Contrast Reversals of Pseudo-Kikuchi Band and Lines Due to Detector Position in Scanning Electron Microscopy

Ichinokawa, T.; Nishimura, Matsuomi; Wada, H.

doi:10.1143/jpsj.36.221

Cited by 13 publications

(9 citation statements)

References 18 publications

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“…As demonstrated in (Dudarev et al ., ), the approach used by Dudarev et al . successfully reproduced observations of contrast inversion effects which depend on the electron detector position (Ichinokawa et al ., ), and which are very similar to the results shown in Figure .…”

Section: Resultssupporting

confidence: 89%

“…A pertinent treatment of the electron transport problem in the presence of diffraction has been given by Dudarev et al in (Dudarev et al, 1995;Peng et al, 2004). As demonstrated in (Dudarev et al, 1995), the approach used by Dudarev et al successfully reproduced observations of contrast inversion effects which depend on the electron detector position (Ichinokawa et al, 1974), and which are very similar to the results shown in Figure 7.…”

Section: Incident Beam Diffraction and The Angular Bse Distributionsupporting

confidence: 72%

“…Returning to the implications of the changes observed in

r_{COM}

, the same underlying mechanism will also cause severe changes in calculated ECPs extracted from the measured EBSD patterns. The calculated ECPs derived from the angle‐resolved EBSD pattern intensity on a vFSD ROI can be directly compared to conventional ECPs measured with electron detectors at different collection positions (Ichinokawa et al ., ; Wells, ). As is shown in Figure , a calculated ECP derived from the top part of the phosphor screen can show an inverted intensity contribution compared to the corresponding ECP from the lower part of the screen.…”

Section: Resultsmentioning

confidence: 98%

“…Thickness effects and the influence of the primary beam energy on the angular distribution of backscattered electrons have also been previously found (Hohn & Niedrig, ; Hohn, ; Niedrig, , ; Böngeler et al ., ; Spranck et al ., ). In the context of investigations on crystalline samples, a rather complex behaviour of diffraction contrast in ECPs observed under angle‐resolving conditions was demonstrated by various authors (Ichinokawa et al ., ; Yamamoto, , ; , ; Yamamoto et al ., ; Wells, ; Reimer et al ., ; Wilkinson & Hirsch, ).…”

Section: Resultsmentioning

confidence: 99%

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Diffraction effects and inelastic electron transport in angle‐resolved microscopic imaging applications

Winkelmann

Nolze

Vespucci

et al. 2017

Journal of Microscopy

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SummaryWe analyse the signal formation process for scanning electron microscopic imaging applications on crystalline specimens. In accordance with previous investigations, we find nontrivial effects of incident beam diffraction on the backscattered electron distribution in energy and momentum. Specifically, incident beam diffraction causes angular changes of the backscattered electron distribution which we identify as the dominant mechanism underlying pseudocolour orientation imaging using multiple, angle-resolving detectors. Consequently, diffraction effects of the incident beam and their impact on the subsequent coherent and incoherent electron transport need to be taken into account for an in-depth theoretical modelling of the energy-and momentum distribution of electrons backscattered from crystalline sample regions. Our findings have implications for the level of theoretical detail that can be necessary for the interpretation of complex imaging modalities such as electron channelling contrast imaging (ECCI) of defects in crystals. If the solid angle of detection is limited to specific regions of the backscattered electron momentum distribution, the image contrast that is observed in ECCI and similar applications can be strongly affected by incident beam diffraction and topographic effects from the sample surface. As an application, we demonstrate characteristic changes in the resulting images if different properties of the backscattered electron distribution are used for the analysis of a GaN thin film sample containing dislocations.

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Section: Resultssupporting

confidence: 89%

Section: Incident Beam Diffraction and The Angular Bse Distributionsupporting

confidence: 72%

“…Returning to the implications of the changes observed in

r_{COM}

Section: Resultsmentioning

confidence: 98%

Section: Resultsmentioning

confidence: 99%

See 2 more Smart Citations

Diffraction effects and inelastic electron transport in angle‐resolved microscopic imaging applications

Winkelmann

Nolze

Vespucci

et al. 2017

Journal of Microscopy

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“…If the signal is collected by a detector which sub tends a small solid angle at the specimen, and can be moved relative to the sample, then contrast changes will occur in the ECP. These effects include variations in the magnitude of the contrast and even reversal in its sign (Ichinokawa et al 1974;Reimer 1979). A satisfactory theoretical treatment of these effects has not yet been presented.…”

Section: Effect Of the Take-off Angle On Ecpmentioning

confidence: 99%

Electron channeling patterns in the scanning electron microscope

Joy¹,

Newbury

Davidson

1982

Journal of Applied Physics

330

132

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A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM Rev. Sci. Instrum. 83, 095105 (2012) Foucault imaging by using non-dedicated transmission electron microscope Appl. Phys. Lett. 101, 093101 (2012) New Products Rev. Sci. Instrum. 83, 079501 (2012) Towards secondary ion mass spectrometry on the helium ion microscope: An experimental and simulation based feasibility study with He+ and Ne+ bombardment This article provides a comprehensive review of the theory, practice, and application of electron channeling patterns in the scanning electron microscope. An atlas of indexed channeling maps for the bcc, fcc, diamond cubic, and hcp systems is included with a bibliography of 240 references containing all known published work on electron channeling for crystallographic studies in the SEM.

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Electron backscatter diffraction beyond the mainstream

Nolze

Hielscher

Winkelmann

2016

Crystal Research and Technology

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We present special applications of electron backscatter diffraction (EBSD) which aim to overcome some of the limitations of this technique as it is currently applied in the scanning electron microscope. We stress that the raw EBSD signal carries additional information which is useful beyond the conventional orientation determination. The background signal underlying the backscattered Kikuchi diffraction (BKD) patterns reflects the chemical composition and surface topography but also contains channeling-in information which is used for qualitative real-time orientation imaging using various backscattered electron signals. A significantly improved orientation precision can be achieved when dynamically simulated pattern are matched to the experimental BKD patterns. The breaking of Friedel's rule makes it possible to obtain orientation mappings with respect to the point-group symmetries. Finally, we discuss the determination of lattice parameters from individual BKD patterns. Subgrain structure in a single quartz grain. The increased noise level in the left map reflects the lower precision of a standard orientation determination using band detection by the Hough transform. The right map results from the same experimental raw data after orientation refinement using a pattern matching approach. The colors correspond an adapted inverse pole figure color key with a maximum angular deviation of about 2 • from the mean orientation.

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Contrast Reversals of Pseudo-Kikuchi Band and Lines Due to Detector Position in Scanning Electron Microscopy

Cited by 13 publications

References 18 publications

Diffraction effects and inelastic electron transport in angle‐resolved microscopic imaging applications

Diffraction effects and inelastic electron transport in angle‐resolved microscopic imaging applications

Electron channeling patterns in the scanning electron microscope

Electron backscatter diffraction beyond the mainstream

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