Control ability of spin coating planarization of resist filmand optimal control of developers

Kuo, Yang-Kuao; Chao, Chuen−Guang

doi:10.1016/j.mejo.2005.10.009

Cited by 12 publications

(6 citation statements)

References 11 publications

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“…31,32 Besides its relatively low technical requirements, spin coating provides films with a sufficiently good degree of thickness homogeneity. 33 In an attempt to precisely determine the concentration corresponding to a maximal photocurrent, we varied the tin concentration in the spin coating solution. The incorporation of tin into the crystal structure of hematite films was directly confirmed by X-ray photoelectron spectroscopy (XPS) and indirectly manifested by changes in the intrinsic magnetic parameters (Morin temperature and N eel temperature) of hematite films.…”

Section: Introductionmentioning

confidence: 99%

Facile fabrication of tin-doped hematite photoelectrodes – effect of doping on magnetic properties and performance for light-induced water splitting

et al. 2012

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Section: Introductionmentioning

confidence: 99%

Facile fabrication of tin-doped hematite photoelectrodes – effect of doping on magnetic properties and performance for light-induced water splitting

et al. 2012

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“…3: (Color online only) Upper (--) and lower (-) limit of the region where the liquid surface has to be before spinning (thick, blue online only) to end up in the BD region (thin, red online only) defined by equation (8). Note that there must be fluid outside of the initial region so that condition (11) is fulfilled during the spinning process lower limit (thick, solid blue line online only) has reached the rim of the hole, i.e., R t À = 1. Longer spin times than these are not allowed, since the dispensed layer cannot extend over the hole.…”

Section: Limitations and Possibilitiesmentioning

confidence: 99%

“…9,10 More applied studies aim at controlling the process to achieve even films for production of microelectronics by different means. [11][12][13] The particular case of spin coating of BDs has also been studied 14 and this work will be returned to later on.…”

Section: Introductionmentioning

confidence: 99%

Spin coating of Blu-Ray disks: modeling, experiments, limitations, and manipulation

et al. 2009

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A major challenge in the production of BluRay Disks (BDs) is making the cover layer over the information area. The layer has to be both thick enough to protect the information and even enough for the information to be read through it optically. Furthermore, it is preferred not to cover the hole in the center of the disk. Spin coating is a candidate method for the production of these layers in a rapid reproduction process. When dispensing is performed off-center (in order not to cover the hole), a new complication appears, namely the formation of a slope toward the inner rim of the liquid film. Here, fundamental limitations for achieving even films in this system and ways to overcome the difficulties by manipulation of the process are studied. A mathematical model for this particular case of spin coating is obtained and validated by comparison with experiments made in industrial equipment aiming at producing BDs. The model agrees well with the experimental data. The model is then used to show that cover layers that fulfil the Blu-Ray specification are very difficult to produce with the spin-coating technique. Manipulation by inline curing and surface shear is added to the model and the results show that it is considerably easier to meet the BD specification when utilizing the manipulation.

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“…The stability in a thin film during spin coating has received much attention due to its wide application in the MEMS technology and thin film materials technology [1][2][3][4]. A great number of theoretical studies and numerical analysis [5] which is related to rotating disk have been carried out for various fluids and the excellent comprehensive review has been conducted by Rajagopal [6].…”

Section: Introductionmentioning

confidence: 99%

Surface Instabilities on a Thin Power-Law Fluid During Spin Coating

2014

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The phenomena of surface instabilities in a thin power-law fluid during spin coating are investigated. The set of Navier-Stokes equations with non-Newtonian behavior in the region of low Reynolds number serves as a mathematical description of the physical systems. Long-wave perturbation analysis is proposed to derive an evolution equation of the Ostwald de-Waele type fluid to govern the propagation of surface waves. Weakly nonlinear dynamics of film flow is studied by the multiple scales method. The amplitude of instability is determined by a Ginzburg-Landau equation. The study reveals that the degree of power-law index plays a vital role in stabilizing the film flow. The shear-thinning fluid is more unstable than the shear-thickening fluid in the stability analysis. Further, the nonlinear wave speed in the supercritical stability region decreases with increasing values of power-law index.

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Control ability of spin coating planarization of resist filmand optimal control of developers

Cited by 12 publications

References 11 publications

Facile fabrication of tin-doped hematite photoelectrodes – effect of doping on magnetic properties and performance for light-induced water splitting

Facile fabrication of tin-doped hematite photoelectrodes – effect of doping on magnetic properties and performance for light-induced water splitting

Spin coating of Blu-Ray disks: modeling, experiments, limitations, and manipulation

Surface Instabilities on a Thin Power-Law Fluid During Spin Coating

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