Control of Compositional Disordering of AlAs/GaAs Superlattice by Ar Ion Implantation

Kawabe, Mitsuo; Ikeda, Yuhei; Shimizu, N.; Mannami, Kyoko; Nannichi, Yasuo

doi:10.7567/ssdm.1986.c-9-2

Extended Abstracts of the 1986 International Conference on Solid State Devices and Materials 1986

DOI: 10.7567/ssdm.1986.c-9-2

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Control of Compositional Disordering of AlAs/GaAs Superlattice by Ar Ion Implantation

Mitsuo Kawabe¹,

Yuhei Ikeda²,

N. Shimizu³

et al.

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Control of Compositional Disordering of AlAs/GaAs Superlattice by Ar Ion Implantation

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