“…3 Several groups have investigated heteroepitaxial growth of ZnO/(ZnMg)O single heterostructures, [4][5][6] single quantum wells (SQWs), [7][8][9][10][11][12][13][14][15] double quantum wells, 16 and multiple quantum wells [17][18][19] on various substrates such as c-plane, a-plane, and r-plane sapphire, c-plane GaN/sapphire templates, Si(111), and ScAlMgO 4 . However, only very few results of homoepitaxial growth of polar ZnO/(ZnMg)O SQWs have been reported, 20 although this growth technique can lead to improved structural, optical, and electrical properties of the resulting ZnO films.…”