2005
DOI: 10.1070/qe2005v035n07abeh002902
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Control of laser machining of polycrystalline diamond plates by the method of low-coherence optical interferometry

Abstract: The performance of existing or nearly completed detectors for particle identification by using the relativistic rise of energy loss will be discussed.Detailed analysis of systematic errors leads finally to large detector systems approaching the ultimate resolution as measured in small test devices.New methods for extracting the information from the counter with the potential of better particle separation than standard dE/dx will be presented. It includes very fine sampling, 6-ray clipping, and cluster counting… Show more

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Cited by 8 publications
(1 citation statement)
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“…Such principle is widespread in industrial devices for glass thickness measurements [7], laser polishing monitoring of diamond plates [8], as well as for monitoring of industrial process of epitaxial growth and plasmochemical etching [9,10] in semiconductor nanoelectronics structures. In all the cases mentioned, the designed devices show unique performance characteristics (including high sensitivity and reliability).…”
Section: The Operating Principle Of the Fosmentioning
confidence: 99%
“…Such principle is widespread in industrial devices for glass thickness measurements [7], laser polishing monitoring of diamond plates [8], as well as for monitoring of industrial process of epitaxial growth and plasmochemical etching [9,10] in semiconductor nanoelectronics structures. In all the cases mentioned, the designed devices show unique performance characteristics (including high sensitivity and reliability).…”
Section: The Operating Principle Of the Fosmentioning
confidence: 99%