Control of liquid crystal alignment by deposition of silicon oxide thin film

Son, Phil Kook; Park, Jeung Hun; Kim, Jae Chang; Yoon, Tae–Hoon

doi:10.1016/j.tsf.2006.09.002

Cited by 24 publications

(14 citation statements)

References 11 publications

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“…The transmittance of SiON thin film was also enhanced with the increase in deposition temperature. This experimental result was the same that the transmittance of several inorganic thin films could be enhanced with the increase in deposition temperature [12,14].…”

Section: Part 2: Vertical Alignment Of Lc Molecules and Optical Propesupporting

confidence: 75%

“…In general, it has been reported that inorganic thin film has lower transmittance than organic one. Especially, SiO x thin film, which is one of the most being studied inorganic alignment materials of LCDs, has the disadvantage that the transmittance of SiO x thin film was reduced compared with polyimide [12]. We measured the transmittance of SiON thin film deposited in various temperature and compared with SiO x thin film.…”

Section: Part 2: Vertical Alignment Of Lc Molecules and Optical Propementioning

confidence: 99%

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Vertical Alignment of Liquid Crystal on a-SiON Thin Film Exposed by Ion Beam

Hwang

Yoon

et al. 2009

Molecular Crystals and Liquid Crystals

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We study the properties of the vertical alignment of liquid crystal on amorphous SiON (a-SiON) thin film exposed by ion beam. a-SiON thin films are deposited on the indium-tin-oxide coated glass substrates by using radio-frequency magnetron sputtering system in the temperature range from 25 to 400 C. The transmittance and surface roughness of a-SiON thin films are enhanced with the increase in deposition temperature. After the substrates were deposited by sputtering system, we exposed them to ion beam and fabricated vertical alignment liquid crystal cells. As a result, the fabricated liquid crystal cells show uniform pretilt angle range from 88 to 89 and high thermal stability over 100 C for 20 hours.

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Section: Part 2: Vertical Alignment Of Lc Molecules and Optical Propesupporting

confidence: 75%

Section: Part 2: Vertical Alignment Of Lc Molecules and Optical Propementioning

confidence: 99%

Vertical Alignment of Liquid Crystal on a-SiON Thin Film Exposed by Ion Beam

Hwang

Yoon

et al. 2009

Molecular Crystals and Liquid Crystals

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“…In depositions performed from a fixed, highly oblique position (a $ 758-898), columnar thin films align LCs roughly parallel to the n 1 vector, while at moderately oblique angles (a $ 308-708), the alignment is generally parallel to the n 2 vector. [23][24][25][26] This property can be traced to the film porosity, where glancing deposition angles and large pores allow penetration of the LC blend into the film itself and force alignment along the columnar structures. [27,28] At moderate a values, however, the LC blend is restricted to the surface, and tends to align along surface corrugations perpendicular to the deposition plane.…”

Section: Alignment Of Liquid Crystalsmentioning

confidence: 99%

A Birefringent and Transparent Electrical Conductor

Harris

Popta

Sit

et al. 2008

Adv Funct Materials

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We have developed a range of thin film coatings that are transparent in the visible, electrically conducting, adjustably birefringent and capable of aligning calamitic liquid crystals. The coatings were fabricated from indium tin oxide by oblique or glancing angle deposition, and a wide range of microstructures such as helices, chevrons, uniaxial posts and biaxial slabs were produced. Under many deposition conditions, these structures showed optical transmittance and electrical conductivity comparable to standard indium tin oxide, yet a strong form birefringence (Δn > 0.07 at 589 nm) was also measured. In addition, many coatings were found to be capable of aligning liquid crystals along a common director, leading us to conclude that the technology may be useful in liquid crystal displays and other lightwave applications.

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“…1 shows the Bragg-Brentano θ/2θ X-ray diffraction pattern from a TiO 2 sample deposited at a target power of 250 W, substrate bias of − 200 V and oxygen partial pressure of 1 × 10 − 5 Torr. The R(111) peak is observed, as well as an amorphous SiO 2 "bulge"~30° [28,29] from the substrate-film interface. Fig.…”

Section: Water Reductionmentioning

confidence: 92%