“…A direct use of CFD models for control design or dynamic optimization involves significant computational cost. Although application of advanced model reduction techniques to derive reduced-order models from the detailed partial differential equation (PDE) process models may work well in certain cases and lead to efficient dynamic optimization and control algorithms (see, for example, Armaou and Christofides, 1999Bendersky and Christofides, 2000;Christofides, 2001;Christofides and Daoutidis, 1997;Graham and Kevrekidis, 1996;Graham et al, 1999;Groetsch et al, 2006;Park and Lee, 2000), such a reduced-order model approach might require a huge amount of memory and computational cost when the CFD model consists of millions of grid points needed to accurately describe the process behavior. The reader may also refer to Raja et al (2000) and Varshney and Armaou (2006) for recent applications of model reduction and dynamic optimization to thin film deposition processes described by CFD equations and Balsa-Canto et al (2004 for further recent results on dynamic optimization and control of distributed parameter systems.…”