2017
DOI: 10.1117/12.2252382
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Control of spectral transmission enhancement properties of random anti-reflecting surface structures fabricated using gold masking

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Cited by 12 publications
(6 citation statements)
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“…The substrates are cleaned further, if needed, with an oxygen rich plasma. 37 When a single-sided rARSS FS substrate is compared to a plain bare FS window, its as-measured forward scattering distributions at 633 nm is negligible. Specifically, total integrated scatter of the rARSS surfaces is lower than eight-orders of magnitude in transmission with respect to the nominal transmission across the visible and NIR bands.…”
Section: Antireflective Treatment Of Air-glass Interfacesmentioning
confidence: 99%
“…The substrates are cleaned further, if needed, with an oxygen rich plasma. 37 When a single-sided rARSS FS substrate is compared to a plain bare FS window, its as-measured forward scattering distributions at 633 nm is negligible. Specifically, total integrated scatter of the rARSS surfaces is lower than eight-orders of magnitude in transmission with respect to the nominal transmission across the visible and NIR bands.…”
Section: Antireflective Treatment Of Air-glass Interfacesmentioning
confidence: 99%
“…A method to increase the size of rARSS to suit infrared optics involves a metal deposition and dewetting that generates quasi-periodic islands. This masking method has demonstrated the ability to tune the geometry, depth, and periodicity of the etch mask structures through variations in parameters such as deposition thickness and thermal annealing temperature [9,10]. These methods involved only one deposition and annealing step for etch mask formation.…”
Section: Arss Fabrication Methods (Periodic Vs Random)mentioning
confidence: 99%
“…The structured surfaces were fabricated using reactive ion etching (RIE) process under different processing conditions outlined in Table 1 and described elsewhere. 32 For baseline comparisons we included double-sided polished (WP) and single-sided polished (WR) silica substrates provided by the manufacturer. The sample A0 was fabricated with the same masking process as A1, W3 and W5, but it was not etched to completion.…”
Section: Conventional Surface Parametersmentioning
confidence: 99%