2019
DOI: 10.1088/1361-6587/aaffb4
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Control-oriented dynamic model of an inductively coupled plasma torch by artificial intelligence methodology

Abstract: Inductively coupled plasma (ICP) torches have been widely used in various materials processing. To improve the control of their processes, there has been a growing demand for simplified numerical models which can rapidly predict the dynamics of plasma jets subject to time-varying inputs or external disturbances. In this paper, control-oriented dynamic models of an ICP torch are developed as an alternative to the complex, high-level 2D time-dependent numerical model (i.e. a model based on magneto-hydrodynamic e… Show more

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Cited by 3 publications
(1 citation statement)
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“…It was mentioned that such approach can better capture the dynamic characteristics, comparing with the normal neural network. Kim examined a linear autoregressive with exogenous (ARX) model and ARX-type neural network models to develop a control-oriented dynamic model of an inductively coupled plasma torch, similar to the work of Liu et al (Ref 39 ). The present work uses RF to prepare three models: the baseline, the simple embedded and the differenced embedded.…”
Section: Discussionmentioning
confidence: 99%
“…It was mentioned that such approach can better capture the dynamic characteristics, comparing with the normal neural network. Kim examined a linear autoregressive with exogenous (ARX) model and ARX-type neural network models to develop a control-oriented dynamic model of an inductively coupled plasma torch, similar to the work of Liu et al (Ref 39 ). The present work uses RF to prepare three models: the baseline, the simple embedded and the differenced embedded.…”
Section: Discussionmentioning
confidence: 99%