2024 7th International Conference on Electronics Technology (ICET) 2024
DOI: 10.1109/icet61945.2024.10673108
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Controllable Deposition of Polyimide Insulation Layer by an Engineered Stepped Pre-curing Method in Double-sided TSV Processes

Baoyan Yang,
Yingtao Ding,
Yigang Hao
et al.
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