Cu2ZnSn(S,Se)4 are emerging as promising photovoltaic materials due to their outstanding photoelectrical performances, benign grain boundaries, and Earth‐abundant constituent elements. However, there are largely distributed cation‐disordering defects and defect clusters, which lead to an increase in recombination and a large open‐circuit voltage deficit and thus deteriorate device performance. Herein, defect control for a high‐efficiency Cu2ZnSn(S,Se)4 solar cell by atomic layer deposition of aluminum oxide (ALD‐Al2O3) on the precursor film is reporter. CuZn defects and Sn‐related deep defects are largely suppressed because of the decrease in Sn2+ and the increase in Sn4+ in the film by ALD‐Al2O3 on the precursor are found, and the crystallinity of absorber layer is improved from a double‐layer structure to a completely single‐layer structure. Furthermore, the carrier lifetime and recombination in the bulk and interface are significantly improved for devices with ultrathin Al2O3. Using this approach, the conversion efficiency increases from 8.8% to 11.0% and the open‐circuit voltage deficit decreases from 0.621 to 0.577 V. Herein, a deep understanding of the relationship between Al2O3 incorporation and high‐efficiency Cu2ZnSn(S,Se)4 devices and a new direction for controlling defects to further improve the performance of kesterite solar cells are provided.