Controlled functionalization of a double-junction n+/n−/n+ polysilicon nanobelt for hydrogen sensing application

Tran, Nhan Ai; Sang, C.; Pan, Fu‐Ming; Sheu, Jeng−Tzong

doi:10.7567/jjap.55.04em01

Cited by 4 publications

(3 citation statements)

References 33 publications

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“…The nanobelts were cleaned sequentially in acetone, isopropanol, and deionized water prior to surface modification (figure 1(a)). A thin layer (50 nm) of poly(methyl methacrylate) (PMMA) was then applied on the devices using a spinner operated at 8000 rpm for 30 s. Localized Joule heating was then induced using an Agilent 4155B pulse generator under an ambient atmosphere [15]. The dissipated power at the nregions selectively ablated the PMMA layer, enabling site-specific deposition of the catalyst under e-beam evaporation (figure 1(b)).…”

Section: Catalyst Functionalization and Characterizationmentioning

confidence: 99%

“…By varying the applied bias length and magnitude, the ablated PMMA area and, thus, the subsequently evaporated catalyst layer were controllable. The length of the catalyst over the nregion can significantly influence the sensor response to H 2 [15]. More than one metal could be deposited on the different devices on one chip simply by repeating this modification process.…”

Section: Samplementioning

confidence: 99%

“…Recently, we proposed a promising H 2 sensing element based on a double-junction n + /n -/n + polysilicon nanobelt structure [15]. These nanobelts were prepared using conventional optical lithography.…”

Section: Introductionmentioning

confidence: 99%

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Hydrogen gas sensors from polysilicon nanobelt devices selectively modified with sensing materials

Tran¹,

Pan²,

Sheu³

2016

Nanotechnology

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Double-junction n/n/n polysilicon nanobelts featuring selectively deposited sensing materials have been investigated for application as H gas sensors. The selective modification of the devices was performed through a combination of localized ablation of a resist and lift-off of a previous catalyst material deposited through e-beam evaporation. Four nanobelt devices, differentiated by their doping concentrations at the n region (from 2.5 × 10 to 2.5 × 10 cm), were analyzed in terms of the responses to H and their self-heating effects. A low doping concentration improved the response at room temperature, owing to a longer Debye length. The variation in the H-induced surface potential associated with temperature, accounting for degradation in the response of the nanobelts with Joule heating bias, was analyzed in terms of the I-V characteristics of the double-junction device. Among various catalysts (Pt, Pd, Pt/Pd) evaluated for their H sensing characteristics, an ultrathin film of Pt/Pd was most favorable.

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Section: Catalyst Functionalization and Characterizationmentioning

confidence: 99%

Section: Samplementioning

confidence: 99%

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Hydrogen gas sensors from polysilicon nanobelt devices selectively modified with sensing materials

Tran¹,

Pan²,

Sheu³

2016

Nanotechnology

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Review of noble metal and metal-oxide-semiconductor based chemiresistive hydrogen sensors

Kafil,

Sreenan,

Hadj-Nacer

et al. 2024

Sensors and Actuators A: Physical

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Highly Sensitive Detection of Hydrogen Gas Using Nanoporous Composites of Halloysite Nanotubes and Palladium

Kafil,

Liles,

Coello-Poole

et al. 2023

ACS Appl. Electron. Mater.

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Hydrogen (H 2 ) detectors are important tools to ensure the safety in H 2 production/storage/transportation/use and also monitor many H 2 -related physiochemical processes in industrial or medical practices. Ideal H 2 detectors should not only have high detection performance (e.g., high sensitivity and selectivity) but also possess low power-consumption, high compactness, simple fabrication using low-cost materials, and ease of instrumentation that can be easily handled and operated. In this work, nanoporous composites by simply reducing palladium (Pd) precursors to the surface of halloysite nanotubes (HNTs) were developed and optimized for the development of a resistive H 2 detector. The detector was prepared by depositing solution droplets of Pd/HNT with an optimal mass concentration on an interdigitated microelectrode surface of 1 cm × 1 cm and then drying it at 65 °C. The developed H 2 detector exhibited reliable H 2 detection, achieving low limit H 2 detections of 27 ppb and <10 ppm in both N 2 and air, respectively. It also presented high selectivity, differencing H 2 from other interfering gases such as CO 2 and CH 4 , and demonstrated stability in its response from room temperature to 50 °C. We attribute the characteristics of the detector performance to the nature of Pd/HNT composites (large surface, high porosity, specific reaction of Pd to H 2 , etc.). Given its high detection performance, simple resistance read-out, and ease of fabrication, it is believed that the developed detector will have broad applications in the H 2 energy industry and many other H 2 -related industrial and medical procedures.

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Controlled functionalization of a double-junction n⁺/n⁻/n⁺ polysilicon nanobelt for hydrogen sensing application

Cited by 4 publications

References 33 publications

Hydrogen gas sensors from polysilicon nanobelt devices selectively modified with sensing materials

Hydrogen gas sensors from polysilicon nanobelt devices selectively modified with sensing materials

Review of noble metal and metal-oxide-semiconductor based chemiresistive hydrogen sensors

Highly Sensitive Detection of Hydrogen Gas Using Nanoporous Composites of Halloysite Nanotubes and Palladium

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