Controlled Morphological Bending of 3D-FEBID Structures via Electron Beam Curing

Abstract

Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in a targeted manner by local irradiation without precursor gas present. This process diminishes the volumes of exposed regions and alters nano-grain sizes, which was comprehensively characterized by SEM, TEM and AFM and complemented by Monte Carlo simulations. For obtaining controlled and reproducible conditions for smooth, stable morphological bending, a wide range of parameters were varied, which will here be presented as a first step towards using local EBC as a tool to realize even more complex nano-architectures, beyond current 3D-FEBID capabilities, such as overhanging structures. We thereby open up a new prospect for future applications in research and development that could even be further developed towards functional imprinting.

Water-assisted purification during electron beam-induced deposition of platinum and gold

“…Fully post-deposition-purified FEBID structures were reported by Seewald et al [ 4 ], who deposited three-dimensional hollow cones of moderate thickness, which were purified using an e-beam-assisted post-deposition process in a low-pressure (80 Pa) water environment. Interestingly, deformation caused by electron beam-induced post-deposition purification can intentionally be used to bend the three-dimensional structure of FEBID deposits [ 39 ]. Purification during deposition avoids some of the disadvantages of post-deposition purification because of the concomitant deposition and purification, which should lead to the direct deposition of the desired FEBID structures.…”

Spectral Tuning of Plasmonic Activity in 3D Nanostructures via High‐Precision Nano‐Printing

“…Precise control over beam translation and exposure times allows for the fabrication of complex metallic nanostructures with mesh‐ [ 44,49 ] or sheet‐ [ 50 ] like features in a single step on most materials and almost any surface geometry (see Figure 1b–f), which makes that technology an excellent approach for areas, where classical techniques such as resist‐based lithography cannot be applied. [ 44,46,51–55 ] The pool of organometallic precursors for the fabrication of 3D‐FEBID metallic nanostructures is still limited (mostly Au, C, Co, Cu, Fe, Mo, Pt, Rh, Ru, Si, W, Co‐Fe metal cores) but continuously grows, thereby also expanding functionalities (semi‐/superconducting, insulating, magnetic, etc.) of FEBID‐based structures.…”

Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices

“…By additionally irradiating the material with an electron beam, the ratio of fully dissociated molecules increases. This leads to a reduction in carbon content and the distance between platinum nanocrystallites [36,39]. In some cases, purification of the material from carbon occurred with the assistance of O 2 and water, causing carbon elimination [40,41].…”