2005
DOI: 10.1088/0957-4484/17/2/015
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Controlled placement of highly aligned carbon nanotubes for the manufacture of arrays of nanoscale torsional actuators

Abstract: We have fabricated ordered arrays of nanoscale torsional actuators consisting of metal mirrors bonded to precisely oriented multiwall carbon nanotubes. The fabrication is facilitated by a new nanotube positioning method which employs localized electron beam activation of polymer residue on a silicon oxide surface.

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Cited by 39 publications
(29 citation statements)
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“…This is also evidenced by the restricted sizes of MEMS motors of millimetres to hundreds of micrometres [16][17][18] . Few can reach tens of micrometres and very few can make truly nanoscale motors even using the best available techniques 12,13,19 . It is highly desirable to investigate new mechanisms to realize large arrays of rotary NEMS devices with high efficiency, nanoscale dimensions, reliable performance and at a low cost.…”
mentioning
confidence: 99%
“…This is also evidenced by the restricted sizes of MEMS motors of millimetres to hundreds of micrometres [16][17][18] . Few can reach tens of micrometres and very few can make truly nanoscale motors even using the best available techniques 12,13,19 . It is highly desirable to investigate new mechanisms to realize large arrays of rotary NEMS devices with high efficiency, nanoscale dimensions, reliable performance and at a low cost.…”
mentioning
confidence: 99%
“…Up to our knowledge, we demonstrate the first torsional actuator, in which the torque is the intrinsic property of the working element: it is not achieved by special configuration of elements ( [12] and Refs. therein) or an external force ( [13] and Refs. therein).…”
mentioning
confidence: 99%
“…This geometry needs to be selectively modified with control over location, length and shells in order to create structures where some shells can axially translate or rotate with respect to others. The most commonly used methods to create nanotube bearings include electrically controlled vaporization of shells [5,7,12] and mechanical shell destruction, either by manipulation [10,14] or electrostatically actuated metal paddles [11,15]. Of these techniques, current driven shell engineering [16][17][18][19][20] is more promising since it is simpler, provides better control over breakdown location and can realize fundamental architectures suited for diverse nanoscale devices.…”
Section: Introductionmentioning
confidence: 99%