2010
DOI: 10.1063/1.3514248
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Controlling metamaterial resonances via dielectric and aspect ratio effects

Abstract: We study ways to enhance the sensitivity and dynamic tuning range of the fundamental inductorcapacitor (LC) resonance in split ring resonators (SRRs) by controlling the aspect ratio of the SRRs and their substrate thickness. We conclude that both factors can significantly affect the LC resonance. We show that metafilms consisting of low height SRRs on a thin substrate are most sensitive to changes in their dielectric environment and thus show excellent potential for sensing applications.There has been intense … Show more

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Cited by 72 publications
(29 citation statements)
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“…By CMP (Chemical Mechanical Planarization), standard photolithography and wet etching process, both SRR structures are fabricated on a 500 ÎŒm thick Rogers RT5880 substrate with the relative dielectric constant of Δ r =2.2 and loss tangent of tgÎŽ= 0.0009. To reduce the operated frequency, the metallic copper thickness is only 2 ÎŒm, which is thinner than the previously designed parameter, since the operated frequency of the SRR based on a thick substrate increases as the SRR thickness increases [22]. Descriptions of other parameters for a nested SRR and traditional SRR structures are shown in Fig.…”
Section: Design Of Structurementioning
confidence: 98%
“…By CMP (Chemical Mechanical Planarization), standard photolithography and wet etching process, both SRR structures are fabricated on a 500 ÎŒm thick Rogers RT5880 substrate with the relative dielectric constant of Δ r =2.2 and loss tangent of tgÎŽ= 0.0009. To reduce the operated frequency, the metallic copper thickness is only 2 ÎŒm, which is thinner than the previously designed parameter, since the operated frequency of the SRR based on a thick substrate increases as the SRR thickness increases [22]. Descriptions of other parameters for a nested SRR and traditional SRR structures are shown in Fig.…”
Section: Design Of Structurementioning
confidence: 98%
“…In [22,23], the direct write technique called proton beam writing (PBW) was used to fabricated high aspect ratio SRRs. In [24,25], MTMs were fabricated on ultra-thin silicon nitride substrates.…”
Section: Influence Of Different Overlayersmentioning
confidence: 99%
“…Based primarily on the design of planar array metallic resonators, both spectral filters [1][2][3][4][5] and thin-film sensors [6,7] have been demonstrated. Interestingly, the quality of the resonant response of these planar devices can be adjusted by controlling the aspect ratio and substrate thickness of the structure [8], or by introducing asymmetry to the underlying structure [3,4].…”
Section: Introductionmentioning
confidence: 99%