Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling

Jamaludin, Fatin Syazana; Sabri, Mohd Faizul Mohd; Said, Suhana Mohd

doi:10.1007/s00542-013-1912-y

Cited by 19 publications

(11 citation statements)

References 91 publications

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Section: Resultsmentioning

confidence: 99%

“…In this study, gallium (Ga) is used as an ion source for FIB milling owing to its high surface tension, a critical feature to maintain the stability of the Ga liquid surface against electric field. [39][40][41] As an extraction voltage is applied between the metal source and the extraction aperture, the Ga liquid is pulled into an extremely sharp "Taylor-Gilbert" cone. Then, the Ga ions are extracted from the tip of this cone by field emission.…”

Section: Fib Milling Parametersmentioning

confidence: 99%

“…The balancing electrostatic potential produced by the extraction voltage and the liquid surface tension forces causes Ga ions to accelerate through the column to reach ground potential on the specimen. [40,42] When the energy of Ga ion surpasses the surface binding energy of specimen, the surface atoms at the selected region will be sputtered to form pore structures.…”

Section: Fib Milling Parametersmentioning

confidence: 99%

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Section: Resultsmentioning

confidence: 99%

Section: Fib Milling Parametersmentioning

confidence: 99%

Section: Fib Milling Parametersmentioning

confidence: 99%

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et al. 2021

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“…The deviation can be attributed to imprecision in the geometry, materials absorption or surface roughness. Possible methods to increase the quality factors include decreasing the sidewall angle [23,24] and post-fabrication annealing [25]. For example, a slight change in the sidewall angle from 6 o to 4 o can increase the theoretical quality factor of the YSO design by a factor of ~2 from 70,000 to 150,000 in YSO.…”

Section: Discussionmentioning

confidence: 99%

High quality factor nanophotonic resonators in bulk rare-earth doped crystals

et al. 2016

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Numerous bulk crystalline materials exhibit attractive nonlinear and luminescent properties for classical and quantum optical applications. A chip-scale platform for high quality factor optical nanocavities in these materials will enable new optoelectronic devices and quantum light-matter interfaces. In this article, photonic crystal nanobeam resonators fabricated using focused ion beam milling in bulk insulators, such as rare-earth doped yttrium orthosilicate and yttrium vanadate, are demonstrated. Operation in the visible, near infrared, and telecom wavelengths with quality factors up to 27,000 and optical mode volumes close to one cubic wavelength is measured. These devices enable new nanolasers, on-chip quantum optical memories, single photon sources, and non-linear devices at low photon numbers based on rare-earth ions. The techniques are also applicable to other luminescent centers and crystal. Fischer, S. Gsell, M. Schreck, and C. Becher, "One-and two-dimensional photonic crystal microcavities in single crystal diamond," Nat. Nanotechnol. 7(1), 69-74 (2011). #256023Received 28

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“…This provided an effective method for optimizing the performance of photoelectric devices based on vertical heterostructures. vices, MEMS devices, chemical analyses in biochemistry, and so on [119]. A controllable 3D structure can be attained by adjusting the FIB-SEM parameters of acceleration voltage, dwell time, milling mode, pitch pixels, and sputtering yield, etc.…”

Section: Semiconductive Materialsmentioning

confidence: 99%

The 3D Controllable Fabrication of Nanomaterials with FIB-SEM Synchronization Technology

Zhao

Cui

et al. 2023

Nanomaterials

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Nanomaterials with unique structures and functions have been widely used in the fields of microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution and multi functions (e.g., milling, deposition, and implantation), focused ion beam (FIB) technology has been widely developed due to urgent demands for the 3D fabrication of nanomaterials in recent years. In this paper, FIB technology is illustrated in detail, including ion optical systems, operating modes, and combining equipment with other systems. Together with the in situ and real-time monitoring of scanning electron microscopy (SEM) imaging, a FIB-SEM synchronization system achieved 3D controllable fabrication from conductive to semiconductive and insulative nanomaterials. The controllable FIB-SEM processing of conductive nanomaterials with a high precision is studied, especially for the FIB-induced deposition (FIBID) 3D nano-patterning and nano-origami. As for semiconductive nanomaterials, the realization of high resolution and controllability is focused on nano-origami and 3D milling with a high aspect ratio. The parameters of FIB-SEM and its working modes are analyzed and optimized to achieve the high aspect ratio fabrication and 3D reconstruction of insulative nanomaterials. Furthermore, the current challenges and future outlooks are prospected for the 3D controllable processing of flexible insulative materials with high resolution.

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Controlling parameters of focused ion beam (FIB) on high aspect ratio micro holes milling

Cited by 19 publications

References 91 publications

A T‐Junction Dual Nanopore for Single Nanoparticle Analysis

A T‐Junction Dual Nanopore for Single Nanoparticle Analysis

High quality factor nanophotonic resonators in bulk rare-earth doped crystals

The 3D Controllable Fabrication of Nanomaterials with FIB-SEM Synchronization Technology

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