Controlling preferential growth of chromium – Nitrogen R-HiPIMS and R-DCMS films by substrate magnetic biasing

Vargas, Santiago; Galeano-Osorio, D.S.; Castano, Carlos E.

doi:10.1016/j.apsusc.2021.151113

Cited by 8 publications

(1 citation statement)

References 80 publications

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“…One limitation when using a feedback control loop on the reactive gas flow is the response time delay needed to stabilize the plasma state. Other methods involve tuning the magnetic field strength surrounding the target [49,50], which are not practical for industrial installations.…”

Section: Introductionmentioning

confidence: 99%

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO₂ deposition process drifts

Boivin,

Jean-Marie-Désirée,

Najah

et al. 2024

Phys. Scr.

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In this work, coupled optical and electrical discharge measurements have been implemented to investigate the plasma state of a reactive HiPIMS TiO2 deposition process running at a fixed duty cycle of 2% and at a repetition rate of 1 kHz. Investigations focus on both the effect of the erosion target and substrate-holder temperature in an Ar/O2 gas mixture at fixed working pressure. First, as the racetrack shape evolves with the use of the target, the deposition rate is modified, in the same way as the emission intensity measured. Second, with the heater set at 400 °C in pure Ar, the coating appears thinner, and the optical emission spectroscopy measurement reveals the presence of oxygen atoms. Thus, the results from the coupled optical and electrical measurements are sensitive enough to track potential drift of the process.

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Section: Introductionmentioning

confidence: 99%

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO₂ deposition process drifts

Boivin,

Jean-Marie-Désirée,

Najah

et al. 2024

Phys. Scr.

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Ceramic-based smart thin films

Li,

2024

Advanced Ceramic Coatings for Energy Applications

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Influence of synchronized pulse bias on the Microstructure and Properties of CrSiN nano-composite ceramic films deposited by MIS-HiPIMS

Gui,

Hu,

Zhou

et al. 2024

Ceramics International

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Controlling preferential growth of chromium – Nitrogen R-HiPIMS and R-DCMS films by substrate magnetic biasing

Cited by 8 publications

References 80 publications

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO₂ deposition process drifts

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO₂ deposition process drifts

Ceramic-based smart thin films

Influence of synchronized pulse bias on the Microstructure and Properties of CrSiN nano-composite ceramic films deposited by MIS-HiPIMS

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Controlling preferential growth of chromium – Nitrogen R-HiPIMS and R-DCMS films by substrate magnetic biasing

Cited by 8 publications

References 80 publications

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO2 deposition process drifts

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO2 deposition process drifts

Ceramic-based smart thin films

Influence of synchronized pulse bias on the Microstructure and Properties of CrSiN nano-composite ceramic films deposited by MIS-HiPIMS

Contact Info

Product

Resources

About

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO₂ deposition process drifts

Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO₂ deposition process drifts