Controlling the electrical properties of ZnO films by forming zinc and oxide bridges by a plasma and electron-assisted process

Shimoi, Norihiro; Harada, Tomoki; Tanaka, Yasumitsu; Tanaka, Shun Ichiro

doi:10.1063/1.4732315

Cited by 7 publications

(2 citation statements)

References 14 publications

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“…We have developed a technique to fabricate ZnO thin films on thin PET substrates using FE electron beam irradiation as a non-equilibrium reaction field as shown in Figure 3a. The ZnO thin films were prepared by wet coating and electron beam irradiation methods [26,27]. In this process, the thickness of the ZnO film was controlled from 100 nm to 10 μm.…”

Section: Non-thermal Formation Of Zno Film On Plastic Film Substrate By Fe Electron Beam Irradiationmentioning

confidence: 99%

Nonthermal Crystalline Forming of Ceramic Nanoparticles by Non-Equilibrium Excitation Reaction Field of Electron

Shimoi¹

2021

Nanocrystals [Working Title]

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In this work, we have discovered a method of forming ZnO thin films with high mobility, high carrier density and low resistivity on plastic (PET) films using non-equilibrium reaction fields, even when the films are deposited without heating, and we have also found a thin film formation technique using a wet process that is different from conventional deposition techniques. The field emission electron-beam irradiation treatment energetically activates the surface of ZnO particles and decomposes each ZnO particles. The energy transfer between zinc ions and ZnO surface and the oxygen present in the atmosphere around the ZnO particles induce the oxidation of zinc. In addition, the ZnO thin films obtained in this study successfully possess high functional thin films with high electrical properties, including high hole mobility of 208.6 cm2/Vs, despite being on PET film substrates. These results contribute to the discovery of a mechanism to create highly functional oxide thin films using a simple two-dimensional process without any heat treatment on the substrate or during film deposition. In addition, we have elucidated the interfacial phenomena and crosslinking mechanisms that occur during the bonding of metal oxide particles, and understood the interfacial physical properties and their effects on the electronic structure. and surface/interface control, and control of higher-order functional properties in metal/ceramics/semiconductor composites, and contribute to the provision of next-generation nanodevice components in a broad sense.

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Section: Non-thermal Formation Of Zno Film On Plastic Film Substrate By Fe Electron Beam Irradiationmentioning

confidence: 99%

Nonthermal Crystalline Forming of Ceramic Nanoparticles by Non-Equilibrium Excitation Reaction Field of Electron

Shimoi¹

2021

Nanocrystals [Working Title]

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“…Ceramic technologies make it possible to manufacture products of various shapes and sizes, varying their morphology, structural and phase state, which allows to control their functional properties by changing the granules sizes in the initial powder mixtures; temperatures, duration and atmosphere of synthesis and the following heat treatments, as well as the type of doping agents [2e4]. Currently, various methods of preparing materials on the basis of ZnO are used worldwide, such as chemical vapor deposition [5e10], atomic layer deposition [11e13], sputtering [14e16], liquid-phase methods for synthesizing ZnO nanowires [17] or nanoparticles [18,19].…”

Section: Introductionmentioning

confidence: 99%