“…These microstructures can change the properties of silicon material dramatically. 1,2) Particularly, the light absorption property in the infrared range (>0:8 m) can be remarkably enhanced to more than 90%, 3,4) which can be widely utilized in various applications, such as solar cells, 5) terahertz emission, 6) negative refraction of light, 7) and optoelectronic detectors. [8][9][10][11] Therefore, many efforts have been devoted to the fabrication of microstructured silicon with different surface morphologies for the larger photoelectric absorption coefficient, including the laser fluence, 12) pulse width, 13,14) polarization, 15) pulse number, 16) wavelength, 17) ambient gas, 18) and gas pressure.…”