Interfaces of dissimilar materials in electronic packaging are prone to crack initiations leading to delaminations. The aim of this paper is to perform a mechanical characteristics comparison approach of the interface structures of different metals with metal Cr. The W/Cr interface, Al/Cr interface, and Cu/Cr interface prototypes were deposited on the quartz glass by using RF magnetron sputtering. The Elastic Modulus and the hardness of the interface prototype were tested by using nano indenter, respectively. The test results show that the elastic modulus and the hardness of these interface prototypes are different at the difference maximum depth h max . The elastic modulus and the hardness of each interface show a marked nonlinearity although there is the same metal Cr in these interfaces samples. Such comparison approach is an important measure to find an appropriate nonlinearity for electronic packaging. The investigation implies that there is a potential probability for improving the mechanical properties in the metal-matching interface for some application.
IntroductionElectronic packages usually consist of bonded materials with different mechanical properties. The interfaces of dissimilar materials are prone to crack initiations leading to delaminations. All interfaces in the electronic packages could be locations for potential failures.[1-23] There are many special properties of the metal films, such as giant conductance, giant hall effect, giant magnetoresistance effect, visible light emission, and so on. As the metal nanofilms are at nanoscale, the physical properties and the response to the environment of the films will happen and there are influences on the surface effect, volume effect, classical size effect, and quantum size effect,[1-2] so the traditional test method cannot be used to measure the mechanical properties of the interface, such as the elastic modulus, residual stress, fracture strength, fatigue strength, and the interfacial binding force. A number of approaches have been developed to investigate interfacial delamination, structure design, and the film's mechanical property in recent years. For example, Soulairol et al. [4] investigated the interface structure of silicon nanocrystals embedded in an amorphous silica matrix. Molecular dynamics simulation was applied in this study. The atom-atom interactions are described by a combination of well-assessed potentials for bulk silicon and SiO 2 , plus a mixing term to