Controlling the preferential orientation in sol-gel prepared CaCu3Ti4O12 thin films by LaAlO3 and NdGaO3 substrates

Pongpaiboonkul, Suriyong; Kasa, Yumairah; Phokharatkul, Ditsayut; Putasaeng, Bundit; Hodak, José H.; Wisitsoraat, Anurat; Hodak, Satreerat K.

doi:10.1016/j.apsusc.2016.05.101

Cited by 9 publications

(4 citation statements)

References 40 publications

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“…The undoped CCTO film has granular morphology with particle diameters in the 10-25 nm range. This granular morphology agrees with previously reported CCTO films deposited via chemical sol-gel methods [15,37]. The appearance of the surface in the case of the Ag-doped CCTO films is in marked difference with the pure CCTO films.…”

Section: Characterization Of the Sensing Materialssupporting

confidence: 91%

Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films

Natkaeo

Phokharatkul²,

Hodak

et al. 2018

Sensors and Actuators B: Chemical

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Section: Characterization Of the Sensing Materialssupporting

confidence: 91%

Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films

Natkaeo

Phokharatkul²,

Hodak

et al. 2018

Sensors and Actuators B: Chemical

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“…The internal barrier layer mechanism is widely accepted for explanation of giant dielectric permittivity in CCTO, where the conducting grains are separated by insulating grain boundaries [9]. Application of CCTO in microelectronics for memory devices, sensors, capacitor and varistors demands the deposition of CCTO thin films on silicon substrate.Due to the unique dielectric behavior of CCTO bulk ceramics, many research groups have initiated deposition of CCTO thin films by different deposition techniques [10-16] on various types of substrates [17][18][19]. Sputtering is considered as one of the most promising deposition technique for thin film deposition [20].…”

mentioning

confidence: 99%

“…Due to the unique dielectric behavior of CCTO bulk ceramics, many research groups have initiated deposition of CCTO thin films by different deposition techniques [10][11][12][13][14][15][16] on various types of substrates [17][18][19]. Sputtering is considered as one of the most promising deposition technique for thin film deposition [20].…”

mentioning

confidence: 99%

Effect of RF sputtering power on morphological and electrical properties of calcium copper titanate thin films

Tripathy

Das

Ghosh

et al. 2017

J Mater Sci: Mater Electron

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dielectric constant, but these are limited to low temperature applications. Beyond the Curie temperature (T c ) their dielectric properties decreases dramatically, which is undesirable for device applications. Recently, CaCu 3 Ti 4 O 12 (CCTO), possessing a distorted cubic perovskite structure, has received intensive consideration due to its extraordinary dielectric behavior [7]. The dielectric constant of CCTO ceramics is in the order of 10 5 over a broad range of temperature due to its stable cubic structure [8] and also no lattice distortion has been observed in CCTO between this temperature range as confirmed by neutron diffraction and high resolution X-ray diffraction [7,8]. The origin of high permittivity in CCTO is still under debate. High dielectric behavior is the common feature in ferroelectric materials. In case of CCTO, the contribution from dipoles has been ruled out due to its centrosymmetry nature even at low temperature [7,8]. The internal barrier layer mechanism is widely accepted for explanation of giant dielectric permittivity in CCTO, where the conducting grains are separated by insulating grain boundaries [9]. Application of CCTO in microelectronics for memory devices, sensors, capacitor and varistors demands the deposition of CCTO thin films on silicon substrate.Due to the unique dielectric behavior of CCTO bulk ceramics, many research groups have initiated deposition of CCTO thin films by different deposition techniques [10-16] on various types of substrates [17][18][19]. Sputtering is considered as one of the most promising deposition technique for thin film deposition [20]. There are very few reports of deposition of CCTO thin film by RF sputtering [12,21]. Sputtering parameters like RF power, deposition pressure, substrate temperature strongly influence the structural, morphological and electrical properties of thin films. In our previous work [22], we have deposited CCTO thin film with the variation of deposition pressure on silicon Abstract Calcium copper titanate (CCTO) thin films were deposited on p-type silicon substrate by RF magnetron sputtering at various RF powers. Post deposition annealing was carried out for all the samples at 950 °C for 1 h in air atmosphere. Various types of surface morphology have been observed for CCTO thin films with the variation of RF power. The evolution of polycrystalline structure of the CCTO thin films was confirmed by XRD studies. The FTIR characteristic absorption band of CCTO was observed in the range of 400-700 cm −1 . The capacitancevoltage (C-V) and current-voltage (I-V) characteristics of the films were investigated employing Al/CCTO/Si MOS capacitors. CCTO films with higher dielectric constant, lower oxide and interface charge density were obtained at higher RF power. Leakage current was also found to be minimum for RF power of 105 W.

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“…In order to cover some cracks and holes appeared on the surface of alumina substrates, the same four-layered deposition was applied on alumina substrates to fabricate CCTO thin films devices for application based on their gas-sensing properties. gel method [41,75]. The appearance of the surface in the case of the Ag-doped CCTO films is in marked difference with the pure CCTO films.…”

Section: Chapter V Results and Discussionmentioning

confidence: 96%

ENHANCING H2S SENSING RESPONSE OF CALCIUM COPPER TITANATE THIN FILMS BY ADDING Ag COMPOUNDS

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Ag-doped CaCu3Ti4O12 (CCTO) thin films with different doping concentrations were prepared by a sol-gel technique. Films were grown by depositing four layers of CCTO on alumina substrates followed by sputtering Au/Cr interdigitated electrodes to fabricate gas sensors. The films were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), energy dispersive X-ray spectroscopy (EDX) Raman spectroscopy and X-ray photoemission spectroscopy (XPS). The films have predominantly the perovskite CCTO crystal phase with very small amount of TiO2 secondary phases. In this thesis, both undoped CCTO and Ag-doped CCTO thin films were tested for selective sensing to H2S gas relative to NH3, H2, NO2 and ethanol vapor. For characterizing gas sensing properties of the films, gas concentrations in the range of 0.2-10 ppm were used with operating temperatures ranging from 150 to 350 ?C. When compared to undoped CCTO sensor, the Ag-doped CCTO sensors presented much higher response. The best sensor response towards H2S was found in 0.9 wt% Ag-doped CCTO film and at the optimum operating temperature of 250 ?C. The highest response of the sensor based on the 0.9 wt% Ag-doped CCTO film to 10 ppm of H2S is approximately 99 which is ten times than that of a sensor based on undoped CCTO film. The doped film sensor also showed stability and relatively short response and recovery times. It is found that Ag plays a role promoting the adsorption as well as the catalytic oxidation of H2S. Therefore, Ag-doped CCTO films with small doping concentration constitute an excellent candidate for developing H2S sensors operating at low-temperatures.

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Controlling the preferential orientation in sol-gel prepared CaCu3Ti4O12 thin films by LaAlO3 and NdGaO3 substrates

Cited by 9 publications

References 40 publications

Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films

Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films

Effect of RF sputtering power on morphological and electrical properties of calcium copper titanate thin films

ENHANCING H2S SENSING RESPONSE OF CALCIUM COPPER TITANATE THIN FILMS BY ADDING Ag COMPOUNDS

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Controlling the preferential orientation in sol-gel prepared CaCu3Ti4O12 thin films by LaAlO3 and NdGaO3 substrates

Cited by 9 publications

References 40 publications

Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films

Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films

Effect of RF sputtering power on morphological and electrical properties of calcium copper titanate thin films

ENHANCING H2S SENSING RESPONSE OF CALCIUM COPPER TITANATE THIN FILMS BY ADDING Ag COMPOUNDS

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Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films

Highly selective sub–10 ppm H2S gas sensors based on Ag-doped CaCu3Ti4O12 films