As
the source for inorganic silica films in the solution process,
perhydropolysilazane (PHPS) and silica sol derived from sol–gel
chemistry have been widely adopted. During the conversion from solution
precursors to inorganic silica, high-temperature treatment is crucial
for the inorganic material’s final composition and densification.
However, the conversion processes of PHPS and silica sol into inorganic
silica differ significantly, which has not been thoroughly investigated.
Therefore, this study systematically examines the thermal conversion
process of PHPS and tetraethyl orthosilicate (TEOS)-derived silica
sols. Results reveal that the conversion of PHPS into inorganic silica
involves hydrolysis, oxidation, and condensation reactions of Si–H,
Si–N, and N–H bonds. In contrast, TEOS hydrolysis produces
silica sol with −OH groups, which undergoes dehydration condensation
and sintering during high-temperature thermal treatment. After heat
treatment at 500 °C, the chemical structure of TEOS-derived films
converts to resemble inorganic amorphous silica, while complete conversion
of PHPS-derived films requires 600 °C, with densification processes
occurring for both films as the temperature rises to 800 °C.
Moreover, these distinct conversion processes may lead to differences
in stress generation, resulting in higher density, mechanical strength,
and critical cracking thickness for PHPS-derived compared to TEOS-derived
films. These findings provide guidelines for the application of two
kinds of solution precursor for inorganic silica films.