2022
DOI: 10.6023/a21120621
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Conversion Process of Perhydropolysilazane to Silica

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Cited by 3 publications
(3 citation statements)
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“…Figure S3a (Supporting Information) shows the result that nanoscale small voids were also formed, which was then ascribed to the evaporation of solvents and release of hydrogen during the densification of the PHPS film. [ 56 ] However, the voids with a scale of 0.5 µm or more were only found on the PHPS film measured in the air, indicating that such larger voids should be due to the interaction of the PHPS films with ambient air. Knowing that PHPS has a high reactivity with moisture, we speculate that the incomplete conversion of the PHPS film in N 2 atmosphere under VUV irradiation leads to a violent reaction with moisture in ambient air, causing the formation of voids.…”
Section: Resultsmentioning
confidence: 99%
“…Figure S3a (Supporting Information) shows the result that nanoscale small voids were also formed, which was then ascribed to the evaporation of solvents and release of hydrogen during the densification of the PHPS film. [ 56 ] However, the voids with a scale of 0.5 µm or more were only found on the PHPS film measured in the air, indicating that such larger voids should be due to the interaction of the PHPS films with ambient air. Knowing that PHPS has a high reactivity with moisture, we speculate that the incomplete conversion of the PHPS film in N 2 atmosphere under VUV irradiation leads to a violent reaction with moisture in ambient air, causing the formation of voids.…”
Section: Resultsmentioning
confidence: 99%
“…Previous studies suggest that this rapid weight gain may result from the oxidation of the remaining Si–H and Si–N bonds (Scheme ). ,,, This finding aligns with the observed decrease in Si–N and Si–H bonds and the concurrent increase in Si–O–Si bonds, as depicted in Figure b.…”
Section: Results and Discussionmentioning
confidence: 99%
“…As temperature increases, this characteristic becomes more obvious [35] . The output current of the traditional structure drain is smaller than that of the new structure at the identical gate voltage, and it can be deduced that the new device has a more potent gate control capacity through the assessment of its transfer characteristics [36] .…”
Section: Transfer Characteristics Of Devicesmentioning
confidence: 99%