Copper micromoulding process for NMR microinductors realization

Coutrot, Anne-Lise; Dufour-Gergam, Elisabeth; Quemper, Jean-Marie; Martincic, Émile; Gilles, Jean-Paul; Grandchamp, J. P.; Matlosz, M.; Sánchez, A. Martı́n; Darasse, L; Ginefri, Jean-Christophe

doi:10.1016/s0924-4247(01)00897-4

Cited by 22 publications

(16 citation statements)

References 7 publications

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“…The antennas are fabricated on these flexible polymer substrates using the copper micromoulding process detailed in [7,20]. Figure 1 summarizes the different steps of the process.…”

Section: Fabrication Processmentioning

confidence: 99%

“…We have developed a monolithic design based on the transmission lines between conductor windings on both sides of a dielectric substrate, called Multi-turn Transmission Lines Resonator (MTLR) [5]. Coils with similar designs (also based on transmission lines) have been fabricated on various rigid substrates such as silicon dioxide [6] and glass [7], then on flexible polymeric substrates such as polyimide [7][8][9] and Teflon [10,11]. This last substrate has a low loss tangent (less than 0.0003 at 1 MHz) which allows to reduce the parasitic capacitance and maximize the quality factor Q of the antennas [11].…”

Section: Introductionmentioning

confidence: 99%

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Fabrication and Packaging of Flexible Polymeric Microantennae for in Vivo Magnetic Resonance Imaging

et al. 2012

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Abstract:In this paper, we detail how microantennae dedicated to Magnetic Resonance Imaging (MRI) can benefit from the advantages offered by polymer substrates, especially flexibility and dielectric properties. We present a monolithic and wireless design based on the transmission lines between conductor windings on both sides of a dielectric substrate and its fabrication process. This last one requires specific plasma treatments to improve polymer/metal adhesion. We have led a comparative study on the effects of the ageing time on the wettability and the metal adhesion to Kapton and Teflon surfaces. Correlation OPEN ACCESSPolymers 2012, 4 657 between wettability (water contact angle) and adhesion (tensile strength) has been established. Then, the use of PolyDiMethylSiloxane (PDMS) as biocompatible packaging material and the optimization of its thickness allows us to conserve suitable f 0 and Q values in a conducting environment such as the biological tissues. These studies allow us to perform 7 Tesla in vivo MRI of the rat brain with a high spatial resolution of 100 x 100 x 200 µm 3 and a Signal to Noise Ratio of 80.

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“…The antennas are fabricated on these flexible polymer substrates using the copper micromoulding process detailed in [7,20]. Figure 1 summarizes the different steps of the process.…”

Section: Fabrication Processmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication and Packaging of Flexible Polymeric Microantennae for in Vivo Magnetic Resonance Imaging

et al. 2012

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“…The copper coil was made of 15-m thick copper electrodeposited on LaAlO 3 by an ultraviolet micromolding process (38). The copper coil had a Q u ϭ 110 at room temperature.…”

Section: Rf Coilsmentioning

confidence: 99%

Performance of a miniature high‐temperature superconducting (HTS) surface coil for in vivo microimaging of the mouse in a standard 1.5T clinical whole‐body scanner

Poirier‐Quinot

Ginefri

Girard

et al. 2008

Magnetic Resonance in Med

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The performance of a 12-mm high-temperature superconducting (HTS) surface coil for in vivo microimaging of mice in a standard 1.5T clinical whole-body scanner was investigated. Systematic evaluation of MR image quality was conducted on saline phantoms with various conductivities to derive the sensitivity improvement brought by the HTS coil compared with a similar room-temperature copper coil. The observed signal-tonoise ratio (SNR) was correlated to the loaded quality factor of the radio frequency (RF) coils and is theoretically validated with respect to the noise contribution of the MR acquisition channel. The expected in vivo SNR gain was then extrapolated for different anatomical sites by monitoring the quality factor in situ during animal imaging experiments. Typical SNR gains of 9.8, 9.8, 5.4, and 11.6 were found for brain, knee, back, and subcutaneous implanted tumors, respectively, over a series of mice.

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“…As sensor, two major benefits are related to reduction of the coil dimension: the increasing of its spatial sensitivity and the feasibility of realizing matrix for magnetic field cartography. Applications are numerous in the domain of NDT (Non-destructive Testing) [1] or Magnetic Resonance Imaging (MRI) [2]. The shrinkage of the device used as actuator allows a local application of the magnetic field.…”

Section: Introductionmentioning

confidence: 99%

High current densities in copper microcoils: influence of substrate on failure mode

Moulin¹,

Woytasik²,

Grandchamp³

et al. 2007

Microsyst Technol

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Copper planar microcoils were processed by U.V. lithography on SiO 2 /Si and Kapton®. The coils were packaged on different supports in order to create varying thermal exchange conditions. The electric current was increased step by step until the electric connection breaks, the microcoils remaining free on a thermal point of view. The copper temperature was estimated from its resistivity. It allowed to show that the thermal exchange mode of the wire-bonded microcoils is conductive. The current density was calculated taking into account the deterioration of the coils by oxidation. Its maximum value is linearly decreasing with the thermal exchange ability of the support. The failure modes of the microcoils are related to track melting and oxidation, the current density remaining one order too weak to induce electromigration.

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Copper micromoulding process for NMR microinductors realization

Cited by 22 publications

References 7 publications

Fabrication and Packaging of Flexible Polymeric Microantennae for in Vivo Magnetic Resonance Imaging

Fabrication and Packaging of Flexible Polymeric Microantennae for in Vivo Magnetic Resonance Imaging

Performance of a miniature high‐temperature superconducting (HTS) surface coil for in vivo microimaging of the mouse in a standard 1.5T clinical whole‐body scanner

High current densities in copper microcoils: influence of substrate on failure mode

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