Correction: Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

Toto, Sofia; Nicolay, Pascal; Morini, Gian Luca; Rapp, M.; Korvink, Jan G.; Brandner, Juergen J.

doi:10.3390/s19143243

Cited by 2 publications

(1 citation statement)

References 1 publication

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For traditional and the thermistor-based Pirani sensors, they work because their resistance changes with the varying pressure, while for a SAW-based Pirani sensor, it is the wave frequency that changes with the varying pressure [94][95][96]. As is known, propagation Figure 6b is a three-dimensional diagram of a diode-based Pirani sensor proposed by Wei et al [91].…”

Section: Saw-based Pirani Sensorsmentioning

confidence: 99%

Overview of the MEMS Pirani Sensors

Zhou

Shi

et al. 2022

Micromachines

View full text Add to dashboard Cite

Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.

show abstract