Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE
DOI: 10.1109/imnc.2000.872611
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Correction of iso-focal tilt in phase edge lithography by adjustment of primary spherical aberration

S. Nakao
1
,
Kouichirou Tsujita2,
Ichiriou Arimoto3
et al.
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