“…30 Silica is used in optical elements because of its antireection properties in high-power laser systems, which can improve the LIDT of the optical components. 31,32 Studies have mostly been conned to the laser parameters, including the pulse duration, 33 laser uence, 34 and wavelength, 35 as well as to the lm processing parameters including the thickness and organic groups 36 that affect the growth of the silica thin lm, such as its morphology and growth rate. However, studies have not modeled the relation between electromagnetic radiation and heat in the silicon dioxide thin lms.…”