Correlation between SiOx content and properties of DLC:SiOx films prepared by PECVD

Zajı́čková, Lenka; Buršı́ková, Vilma; Peřina, Vratislav; Macková, Anna; Janča, Jan

doi:10.1016/s0257-8972(03)00681-9

Cited by 34 publications

(24 citation statements)

References 15 publications

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“…These precursors might be gaseous (Silane -(SiH4) and oxygen (O2) mix) [44] , tetra methyle silane-TMS ((CH3)3SiH and oxygen mix) [45] or liquids Hexamethyle disiloxane HMDSO (C6H18OSi2) [46][47][48][49][50][51] , or tetraethoxysilane (TEOS, (C2H5O)4Si [52] , or tetraethylorthosilicate-TEOS (SiC8H20O4) [53,54,21] , hexa methyle disilane-HMDS (C6H18Si2) [55] and mixed siloxane and silazane precursors.…”

Section: Precursorsmentioning

confidence: 99%

“…Stress can be further decreased by increasing the Si atomic concentartion [52] . Hardness and young modulus are decreased in DLN film in comparison with DLC film [22,45,46,53,54,58,59] .…”

Section: Mechanical Propertiesmentioning

confidence: 99%

“…it is reported that increase in optical band gap causes increase in optical transparency [46,62,63] .…”

Section: Optical Propertiesmentioning

confidence: 99%

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Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Adhikary¹,

Das

De³

et al. 2018

CAN

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Diamond-like Nanocomposites (DLN) is a newly member in amorphous carbon (a:C) family. It consists of two or more interpenetrated atomic scale network structure. The amorphous silicon oxide (a:SiO) is incorporated within diamond-like carbon (DLC) matrix i.e. a:CH and both the network is interpenetrated by Si-C bond. Hence, the internal stress of deposited DLN film decreases remarkably compare to DLC. The diamond like properties has come due to

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Section: Precursorsmentioning

confidence: 99%

“…Stress can be further decreased by increasing the Si atomic concentartion [52] . Hardness and young modulus are decreased in DLN film in comparison with DLC film [22,45,46,53,54,58,59] .…”

Section: Mechanical Propertiesmentioning

confidence: 99%

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Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Adhikary¹,

Das

De³

et al. 2018

CAN

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“…But the most reliable results about hydrogen concentration are obtained using other characterization techniques, such as Rutherford back scattering (RBS) and elastic recoil detection (ERDA). It was reported that DLC:SiO x films might contain (20 -47) at.% of hydrogen [7,21].…”

Section: Chemical Compositionmentioning

confidence: 99%

“…Due to the decreased stress there is no problem to deposit DLC:SiO x films thicker than 1 μm, while in the case of the DLC it is problematic. Synthesis of the DLN films of thickness of several microns [7,11,21,43] and even up to 10 μm [12] was reported.…”

Section: Residual Stress Hardness and Young's Modulusmentioning

confidence: 99%

Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

Meškinis

Tamulevičienė

2011

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The present article reviews current situation on SiO_x containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.

http://dx.doi.org/10.5755/j01.ms.17.4.770

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PI³D processing of DLC coatings for different applications

Никифоров

Ryoo

et al. 2008

Phys. Status Solidi (c)

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DLC (a ‐C:H) and Si‐DLC coatings have been deposited on various materials (steel, aluminium, silicon, glass, polymers) using a 1‐m3 interior‐antenna ICP PI3D facility with HMDSO and toluene as precursors. For conformal treatment of 3‐D workpiececs, a low‐voltage (0.5 ‐ 1) kV, high repetition rate (up to 70 kHz) pulsing was applied. However, DLC formation on dielectric substrates was performed at higher (2 ‐ 10) kV voltage using short (1 ‐ 1.5) μs pulses to minimize surface charging. Coating adhesion was achieved by formation of multi layer structure comprising Si‐containing buffer layer, transient layer, DLC layer with gradually increasing hardness, and top hard DLC. Film hardness was (5 ‐ 20) GPa, and the deposition rate (4 ‐ 0.5) μm/h. DLC surface roughness was (0.7 ‐ 60) nm and water contact angle 70° ‐ 110° depending on process parameters which implies various applications. Batch processing of sliding parts, cutting tools, glass moulds was performed. Double‐side DLC coating on polymer web eliminated its rolling up due to the coating stress. With novel ICP antenna the DLC processing is promising for large‐scale nano pattern transfer technology. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Correlation between SiOx content and properties of DLC:SiOx films prepared by PECVD

Cited by 34 publications

References 15 publications

Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

PI³D processing of DLC coatings for different applications

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Correlation between SiOx content and properties of DLC:SiOx films prepared by PECVD

Cited by 34 publications

References 15 publications

Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Characterization and Applications of Diamond-like Nanocomposites: A Brief Review

Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

PI3D processing of DLC coatings for different applications

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Product

Resources

About

PI³D processing of DLC coatings for different applications