Correlation between the microstructures and the cycling performance of RuO2 electrodes for thin-film microsupercapacitors

Abstract

Articles you may be interested inMicrostructure and ferroelectric properties of epitaxial cation ordered PbSc0.5Ta0.5O3 thin films grown on electroded and buffered Si (100) All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes J. Vac. Sci. Technol. B 21, 949 (2003); 10.1116/1.1565348 Solid state supercapacitor materials: Layered structures of yttria-stabilized zirconia sandwiched between platinum/ yttria-stabilized zirconia composites J. Appl. Phys. 90, 5303 (2001); 10.1063/1.1410883Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO 3 films grown by metalorganic chemical vapor depositionWe have fabricated all solid-state thin-film microsupercapacitors ͑TFSCs͒ using RuO 2 electrodes and LiPON electrolytes. The RuO 2 electrodes were grown at oxygen gas flow ratios ͓O 2 /(O 2 ϩAr)͔ of 10% and 30%. Room-temperature charge-discharge measurements show that specific capacitance is dependent on the oxygen gas flow ratio. Glancing angle x-ray diffraction ͑GXRD͒ and transmission electron microscopy ͑TEM͒ results show that the RuO 2 electrodes grown at 10% contain nanocrystallites ͑0.7-10 nm across͒ embedded in the amorphous matrix, while the electrodes grown at 30% are polycrystalline ͑with grains of 0.7-15 nm in diameter͒. Based on the GXRD, TEM, Auger electron spectroscopy depth profile, and scanning electron microscopy results, the oxygen flow ratio dependence of the cycling performance of the RuO 2 -based TFSCs are discussed in terms of the combined effects of the microstructures of the electrodes, interfacial products, and the surface morphology of the electrodes.

Review on Current Progress of MnO2‐Based Ternary Nanocomposites for Supercapacitor Applications

“…Nonetheless, certain transition metal oxides like RuO 2 , V 2 O 5 , MoO 3 , etc., despite having ultra‐high pseudocapacitances, are rarely employed in practical devices owing to their extreme cost and low availability. They are more conducive for designing powerful miniatured micro‐supercapacitors or allied EES systems that require minimum material concentrations to afford the incurred production costs [45–47,65−67] . Thus, suitable alternative electroactive materials for large scale applicability are extremely urged.…”

Fabrication and characterization of a SnO2−RuO2 composite anode for a hybrid thin film battery

“…Tin films of tin oxides prepared by Brousse et al [5] and S.C. Nam et al [6] showed that oxides in crystalline form also exhibited higher capacities and longer cycles than oxides in amorphous form by low-pressure chemical vapor deposition (LPCVD) and e-beam evaporation. In addition, RuO2 shows promise as a supercapacitor electrode material exhibiting a high specific capacitance [7][8][9][10][11][12]. Due to the cost of ruthenium, there have been several studies that have combined ruthenium oxide with other materials to form composite electrodes [13,14].…”

Fabrication and Structural Characteristics of Ordered TiO2−Ru(−RuO2) Nanorods in Porous Anodic Alumina Films on ITO/Glass Substrate

“…Oxide materials containing titanium and ruthenium are of great interest for their applications in a variety of fields such as photocatalysis, solar cells, electronics, chemical sensors, industrial electrochemistry, and energy storage systems. − Usually, large surface areas with fine crystal structures (preferably in nanoscale) are required to facilitate ions- and/or electron-transfer reactions. So far, many studies have been devoted to forming various TiO 2 −RuO 2 , TiO 2 , or RuO 2 materials in forms of powders, − aerogels, and coatings − by means of sol−gel method, − sputtering deposition, − and electrodeposition. − Especially, electrochemical deposition techniques, which are conventionally used to achieve various metal and alloy coatings on conductive substrates, have attracted much attention for the low cost of equipment and starting materials and for the ability to deposit desired oxides without impurities such as carbon from organic solvents in a sol−gel process.…”