“…This crystalline quality can be quantified by an x-ray diffraction (XRD) measurement. The full-width at half maximum (FWHM) of XRD rocking curves of (002) peak (x-scan) are 430, 530, and 650 arc-seconds, respectively, for samples A, B, and C. 13 As a comparison, the undoped GaN epilayers grown on sapphire synthesized with the same MOCVD system typically have a FWHM of approximately 360 arc sec for (002) racking curve. The quantitative measure of crystalline quality allows the investigation of its impact in other parameters of Er:GaN waveguides.…”