Abstract:Contactless three-dimensional (3-D) interconnects have been proposed as an alternative to through-silicon via (TSV) due to its manufacturing compatibility with two-dimensional (2-D) processes. Typically, contactless 3-D circuits are thought to require considerable silicon resources compared to TSV. However, recent manufacturing options, such as extreme wafer thinning, provide new opportunities for this approach. This paper, therefore, explores these opportunities for producing 3-D systems of lower cost. The pr… Show more
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