2021
DOI: 10.1038/s41378-021-00265-y
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Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

Abstract: Electrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite ele… Show more

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Cited by 11 publications
(18 citation statements)
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“…Finally, the application of our zero-mode LPM Eq. (47) to the simulation results and experimental findings of Melnikov et al 16 , reveal a very good agreement.…”
Section: Introductionsupporting
confidence: 68%
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“…Finally, the application of our zero-mode LPM Eq. (47) to the simulation results and experimental findings of Melnikov et al 16 , reveal a very good agreement.…”
Section: Introductionsupporting
confidence: 68%
“…Within the realm of Euler-Bernoulli theory, these boundaries are independent of the shape of the beam cross section. While this fact certainly is known from numerical studies 16 , it is derived here based on an analytical model, probably for the first time.…”
Section: E Synopsis Of the Zero-mode Lpmmentioning
confidence: 94%
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