Coupled chaotic vibration during pressure detection of micro-resonant pressure sensor

Abstract

In measuring gas pressure, the stiffness of the resonator in the micro-resonant pressure sensor changes. If the design parameters are not properly selected, there will be significant changes of vibration or even chaotic vibration in the process of gas pressure detection, which seriously affects the detection accuracy and the stability of the sensor. The micro-resonant pressure sensor is in an environment of deep coupling and mutual influence of multiple physical fields when detecting the external environmental pressure. In this work, a multi-field coupling nonlinear vibration model of the resonant sensor used in pressure detection is established, and the multi-field coupling bifurcation, chaos and other complex vibration characteristics of the sensor system are explored. The influence of the initial gap between the resonator and the base, the length of the resonator, and the excitation voltage on the vibration state during pressure detection are analyzed, and the stable vibration range of each influencing parameter is determined. The results show that when the sensor detects the pressure, the initial gap of the sensor, the length of the resonator, and the stability of the excitation voltage decrease, causing unstable vibration of the sensor. In order to obtain stable sensor detection performance, it is necessary to determine the stability range of sensor related parameters correctly.