2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) 2019
DOI: 10.1109/memsys.2019.8870754
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Coupled Piezoresistive Graphene Nano-Resonators

Abstract: Single atom thick graphene nanomechanical resonators can have very low mass yet high stiffness leading to the potential of very high sensitivity frequency based mass and force sensors. This sensitivity can be further enhanced by coupling two resonators using the Eigenvalues of the response. However, high Q graphene resonators are difficult to manufacture and measure. In this paper, we report the first ever coupled graphene nanoresonator system utilizing the inherent piezoresistivity of graphene. The structure … Show more

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“…Recently, the existence of higher‐order nonlinearity (e.g., the fifth‐order nonlinearity) was observed in a H‐shaped graphene NEMS resonator, which was piezomechanically actuated and piezoresistively measured at the room temperature. [ 447 ] Hajjaj et al. [ 448 ] published a review of analytical approaches and perturbation techniques for scrutinizing the nonlinear vibrations of M/NEMS resonators.…”
Section: Fundamental Concepts Of Nano/micromechanical Resonatorsmentioning
confidence: 99%
“…Recently, the existence of higher‐order nonlinearity (e.g., the fifth‐order nonlinearity) was observed in a H‐shaped graphene NEMS resonator, which was piezomechanically actuated and piezoresistively measured at the room temperature. [ 447 ] Hajjaj et al. [ 448 ] published a review of analytical approaches and perturbation techniques for scrutinizing the nonlinear vibrations of M/NEMS resonators.…”
Section: Fundamental Concepts Of Nano/micromechanical Resonatorsmentioning
confidence: 99%