“…For instance, a local modulation in the periodic geometry creates a cavity [34] and a waveguide [35][36][37][38] sustained by the bandgap, which spatially traps and guides acoustic waves, respectively. This PnC concept has been introduced into various micromechanical systems at microwave frequencies, including surface acoustic wave (SAW) devices [39,40], suspended nanobeams [6,7,15,16,41] and membranes [37,38,42]. In terms of the scalability of device integration, a suspended PnC membrane is a suitable platform because it can realize both a high quality (Q) factor and a small mode volume (V m ), leading to a low loss and a small device footprint.…”