“…1,3,16,17,23,24,27,32,35 Nevertheless, large geometry ion microprobes (LG-SIMS) such as SHRIMP (Sensitive High Resolution Ion MicroProbe) or CAMECA IMS 1270 and its upgraded series are generally not used for low-concentration water measurements despite their higher inherent sensitivity, as their large volumes including transfer and coupling column might lead to an unmanageable vacuum in the sample chamber (generally ∼10 −8 mbar vs. ∼10 −10 mbar for small geometry ones) and affect water molecule desorption on the mount surface, resulting in a high limit of detection (LOD). Although recent developments have reduced the LOD to a few ppm, 30,36,37 they are still insufficient to analyze the samples with <10 ppm H 2 O content, such as the lunar samples returned from the Apollo and Chang'E missions. 14,15 In this study, we present an improved LG-SIMS (CAMECA IMS 1280-HR) procedure for achieving sub-ppm LOD for water analysis, proofed by analyzing new quartz working reference materials with ultralow H 2 O content.…”