CoxCrFeNiTi High-Entropy Alloys Prepared via Mechanical Alloying and Spark Plasma Sintering for Magnetron Sputtering Coatings

Abstract

The main objective of this study was to develop a high-entropy alloy (HEA) derived from the CoxCrFeNiTi HEA system (x = 0.5, 1) for protective coatings using the magnetron sputtering method. In order to produce the high-entropy alloy targets required for the magnetron sputtering process, mechanically alloyed metallic powders were consolidated via spark plasma sintering (SPS). The microstructural analysis results of the HEA mixture presented morphology changes after 30 h of alloying, with the particles presenting uniform polygonal shapes and dimensions. Subsequently, 316L stainless steel (SS) specimens were coated via magnetron sputtering, comparing their composition with that of the sputtering targets used for deposition to establish stoichiometry. Microstructural analyses of the SPSed HEAs revealed no defects and indicated a uniform elemental distribution across the surface. Furthermore, the CoCrFeNiTi equiatomic alloy exhibited a nearly stoichiometric composition, both in the coating and the sputtering target. The XRD analysis results indicated that amorphous coatings were obtained for both Co0.5CrFeNiTi and the CoCrFeNiTi HEA, and nanoindentation tests indicated that the CoCrFeNiTi HEA coating presented a hardness of 596 ± 22 HV, compared to the 570 ± 19 HV measured for Co0.5CrFeNiTi, suggesting an improved wear resistance.