2013
DOI: 10.1016/j.tsf.2012.08.056
|View full text |Cite
|
Sign up to set email alerts
|

(Cr1−xAlx)N: A comparison of direct current, middle frequency pulsed and high power pulsed magnetron sputtering for injection molding components

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

5
36
0
5

Year Published

2015
2015
2017
2017

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 90 publications
(46 citation statements)
references
References 31 publications
5
36
0
5
Order By: Relevance
“…In the XRD patterns from coatings annealed at 800 °C (Figure 7b), it is evident that most of the diffraction curves are similar to those of the as-deposited and 600 °C annealed Figure 6 shows the hardness and elastic modulus values of the AlCrN coatings as a function of charge voltage. The values of coating hardness and elastic modulus in this study are comparable to the values found in other studies [22,26]. As the charge voltage increased, the hardness and elastic modulus of the AlCrN coatings initially increased from 24.4 GPa and 401.6 GPa at 350 V to maximum values of approximately 28.6 GPa and 439.5 GPa at a charge voltage of 450 V, respectively.…”
Section: Chemical Composition Morphology and Phase Structure Of Thesupporting
confidence: 89%
See 2 more Smart Citations
“…In the XRD patterns from coatings annealed at 800 °C (Figure 7b), it is evident that most of the diffraction curves are similar to those of the as-deposited and 600 °C annealed Figure 6 shows the hardness and elastic modulus values of the AlCrN coatings as a function of charge voltage. The values of coating hardness and elastic modulus in this study are comparable to the values found in other studies [22,26]. As the charge voltage increased, the hardness and elastic modulus of the AlCrN coatings initially increased from 24.4 GPa and 401.6 GPa at 350 V to maximum values of approximately 28.6 GPa and 439.5 GPa at a charge voltage of 450 V, respectively.…”
Section: Chemical Composition Morphology and Phase Structure Of Thesupporting
confidence: 89%
“…Therefore, the phase separation was more apparent in the coatings deposited at high charge voltages (500-550 V). Similar results were reported by Bagcivan et al [26]. In their research, (Cr 1−x Al x )N coatings were deposited by DCMS, MF-MS (Middle Frequency Magnetron Sputtering), and HPPMS techniques, in which the Al/Cr ratios for initial h-AlN formation were compared.…”
Section: Introductionsupporting
confidence: 80%
See 1 more Smart Citation
“…Further more parameters are available to control the process and finally the mechanical as well as chemical properties of the coating. In this way, HPPMS simplifies coating deposition on complex geometries [22][23][24][25][26]. In addition to that, plasma-based deposition of coating layers has considerable ecological and economic advantages [27,28].…”
Section: Introductionmentioning
confidence: 99%
“…Al/Cr ratios) on their phase composition [2][24], deposition control parameters [25], [26], and high temperature oxidation properties [18], [19].…”
Section: Introductionmentioning
confidence: 99%