2013
DOI: 10.1186/1556-276x-8-441
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Cracked titanium film on an elastomeric substrate for highly flexible, transparent, and low-power strain sensors

Abstract: Strain-dependent cracking behaviors in thin titanium (Ti) films on polydimethylsiloxane (PDMS) substrates were systematically investigated for their application to sensitive, flexible, transparent, and portable strain sensors. When uniaxially elongated, vertical cracks were developed in the low-strain range, and beyond a critical strain, tilted cracks appeared to intersect the vertical cracks. The cracking behaviors were also dependent on Ti film thickness. The varying strain-dependent crack patterns produced … Show more

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Cited by 10 publications
(3 citation statements)
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“…The high sensitivity of the a-C/PDMS sensor originates from the crack-based electrical conduction mechanism on a 2D level. 12,32 In this study, the piezoresistive performance was modulated by controlling the distribution of cracks and scales in-plane by varying the a-C film deposition time. As shown in Figure 4, the series of a-C films with different thicknesses exhibited different strains and thus various morphologies on the PDMS surface.…”
Section: Resultsmentioning
confidence: 99%
“…The high sensitivity of the a-C/PDMS sensor originates from the crack-based electrical conduction mechanism on a 2D level. 12,32 In this study, the piezoresistive performance was modulated by controlling the distribution of cracks and scales in-plane by varying the a-C film deposition time. As shown in Figure 4, the series of a-C films with different thicknesses exhibited different strains and thus various morphologies on the PDMS surface.…”
Section: Resultsmentioning
confidence: 99%
“…For example, conventional metallic strain gauge for the small strain sensing has a small GF (usually only about 2.0), [ 1,12 ] and researchers have developed semiconductor strain gauges with higher GF values (more than 100) since 1957, [ 13,14 ] which can significantly increase the magnitude of the output signal and improve the measurement accuracy. In the investigation of stretchable strain sensors, which is a hot topic recently, the record of the GF has been updated rapidly to as high as 10 7 [ 1,3,5,15–49 ] ( Figure ) with the continuing efforts of the scientists. However, is the conclusion, that the GF is the bigger the better, correct for the ultrastretchable strain sensors?…”
Section: Figurementioning
confidence: 99%
“…As another approach for realizing stretchable strain sensors, some research groups have used cracked metal film structures on an elastomeric substrate. Noh formed microcracks and buckle structures in titanium (Ti) films sputtered on PDMS by mechanical stretching [ 86 ], and Lacour et al induced tri-branched microcracks in Au films electron-beam-evaporated on PDMS [ 87 ]. Although these strain sensors were easily fabricated and presented strain-dependent resistance change, the repeatability of resistance signals needs to be further guaranteed.…”
Section: Stretchable Sensorsmentioning
confidence: 99%