Anatase TiO 2 films were deposited on glass substrates at 50 and 200 • C to investigate the effect of growth temperature on the photocatalytic acitivity of the films. It was observed that the films grown at 200 • C were composed of columnar crystallites and were more porous than the films grown at 50 • C which had more compact structures. Also, the film crystallinity increased from 75 to 90% if the higher growth temperature was used. Despite the higher crystallinity, it was observed that for crystallinities between 60 and 90%, the photocatalytic behavior of the films was more significantly affected by changes in the surface area.