2024
DOI: 10.1063/5.0231271
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Crater-shaped enrichment of VSi color centers in 4H-SiC using single-pulse near-infrared femtosecond laser processing

Mengzhi Yan,
Junlei Zhao,
Ying Song
et al.

Abstract: Currently, silicon vacancy (VSi) color centers in SiC are of significant interest due to their potential applications in quantum sensing and quantum communication. Meanwhile, femtosecond lasers, as a non-thermal processing technique, offer considerable advantages in machining hard and brittle materials, such as SiC. Femtosecond laser processing effectively increases the yield of VSi color centers in bulk materials and forms crater-shaped enriched regions on the surface. However, a notable gap exists in simulat… Show more

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