We have irradiated fused silica with monochromatic x rays from a synchrotron radiation source, and have shown for the first time that the efficiency of producing E' spins increases nonlinearly with photon energy for silica containing a large concentration of preexisting defects, and almost linearly for silica containing very few preexisting defects. It is concluded that £" defects are created or activated with efficiencies proportional to approximately the first or second powers, respectively, of the initial energy of the energetic electrons produced by x-ray absorption. PACS numbers: 6l.80.Cb, 61.42.+h, 76.30.Mi There are three distinct point defects which have been observed at room temperature by electron paramagnetic resonance (EPR) in irradiated high purity silica: the £" center, the nonbridging oxygen hole center (NBOHC), and the peroxyl radical oxygen hole center (PROHC). The nature of these dominant broken bond defects in vitreous (r-) SiC>2 has been reviewed by Griscom [1], The E' center was first studied by Weeks [2], and has been assigned by Feigl, Fowler, and Yip [3] to an electron trapped on a three-bonded Si atom which is part of an asymmetrically relaxed oxygen vacancy. The NBOHC has been assigned by Stapelbroek et al. [4] to a hole trapped on the unbonded p 2 orbital of a nonbridging oxygen, while the PROHC has been attributed by Friebele et al, [5] to a hole trapped on the unbonded p 2 orbital of the singly bonded oxygen atom in a dangling peroxyl radical. The growth of the E' signal with x irradiation in fused silica depends strongly on the concentration of hydroxyl groups, as well as the annealing history of the sample. Figure 1 displays data from Galeener and co-workers [6,7], showing the total number of E' spins (TV) produced as a function of dose (D) for identically annealed fused silica samples that had been irradiated with x rays from a 40-kV Cu-target x-ray tube. The N induced in Suprasil-1 [8] (a "wet" silica which contains a high concentration of hydroxyl groups, [OH] -1200 ppm) is linear with D over the entire dose regime investigated, while the "dry" Suprasil-Wl ([OH]-4 ppm) exhibits a nonlinear behavior. Galeener and co-workers [6,7] have shown that the new spins appearing in the high dose linear regions of Fig. 1 in both Suprasil-1 and Suprasil-Wl are due to the creation of new E' defect centers, while the nonlinear growth at lower doses in Suprasil-Wl is due to the activation of preexisting defects. Creation by x irradiation involves the breaking of one or more bonds at a previously completely bonded site, while activation merely involves the transfer of an electron or hole to or from a previously existing broken bond [7]. Quantitative analysis of the data in Fig. 1 shows that at doses below about 3 Mrad (SiOa) both curves are again linear, and that at least 80% of the E' spins observed in Suprasil-1 have been created, while in the Suprasil-Wl at least 80% have been activated from preexisting defects [7]. Thus creation dominates in wet Suprasil-1 and activation dominates in dry Supr...