Creation of Ultra-precision Microstructures with High Aspect Ratios

Takeuchi, Yoshimi; Suzukawa, Hajime; Kawai, Tomohiko; Sakaida, Y.

doi:10.1016/s0007-8506(07)60377-1

Cited by 20 publications

(10 citation statements)

References 7 publications

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“…Some miniature or microcomponents require complex, threedimensional (3D) geometries and need to be made from a variety of engineering materials. The materials are application-dependent, optical components made from glass, polymer, or aluminium, medical components from polymer or glass, mechanical components from ferrous or non-ferrous metals, and dies/ moulds from copper alloys, aluminium, or highhardness steels [4][5][6][7][8][9][10][11][12]. In some particular applications, microcomponents and microstructures even require submicrometre accuracy and nanometre surface roughness [13].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools

Huo¹,

Cheng²

2010

Proceedings of the Institution of Mechanical Engineers, Part B:

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Insufficient experimental data from various micro tools limit industrial application of the micromilling process. This paper presents an experimental comparative investigation into micromilling of oxygen-free, high-conductivity copper using tungsten carbide (WC), chemistry vapour deposition (CVD) diamond, and single-crystal diamond micromilling tools at a uniform 0.4 mm diameter. The experiments were carried out on an ultra-precision micromilling machine that features high dynamic accurate performance, so that the dynamic effect of the machine tool itself on the cutting process can be reduced to a minimum. Micromachined surface roughness and burr height were characterized using white light interferometry, a scanning electron microscope (SEM), and a precision surface profiler. The influence of variation of cutting parameters, including cutting speeds, feedrate, and axial depth of cut, on surface roughness and burr formation were analysed. The experimental results show that there exists an optimum feedrate at which best surface roughness can be achieved. Optical quality surface roughness can be achieved with CVD and natural diamond tools by carefully selecting machining conditions, and surface roughness, R a , of the order of 10 nm can also be obtained when using micromilling using WC tools on the precision micromilling machine.

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Section: Introductionmentioning

confidence: 99%

Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools

Huo¹,

Cheng²

2010

Proceedings of the Institution of Mechanical Engineers, Part B:

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“…One design principle is to provide support to the feature during machining. Currently, constant level Z is often used [1,6,8] for micromachining of micro-features with high aspect ratios. Micro pins that are 20 μm in diameter and having an aspect ratio of 35 were machined using this tool path in [8].…”

Section: Introductionmentioning

confidence: 99%

Micromilling of thin ribs with high aspect ratios

Zdebski

Langen

et al. 2010

J. Micromech. Microeng.

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Micro features with high aspect ratios are one of the commonly encountered geometries found in micro products. In the literature, these structures are often used in demonstrator products machined by a micromilling process. In this paper, the challenges in micromilling thin ribs with high aspect ratios have been studied. Due to the scaling effect, micro-ribs have relatively low stiffness but high natural frequency. Therefore, on the one hand, average forces have to be controlled well to avoid structural bending or even damage, while on the other hand, micro features are unlikely to be excited by the dynamic forces. The characteristics of micromilling forces and their relationships to the machining parameters, namely, feed per tooth, depth of cut and width of cut, were studied theoretically by force models. In addition, the effects of different milling strategies (up-/down-milling) and tool paths on the quality of thin features have been investigated using FEM. The results allow measures to be taken to minimize the force effects and support the micro features during machining. The experimental results verify the theoretical studies. Thin ribs about 15 μm wide and with an aspect ratio of more than 50 were machined with good form and surface quality.

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“…Relationships between fundamental elements for the approach are illustrated in Figure 8.2. Reproduced from [7,8], (e) Micro walls (nickel silver). Reproduced from [5,6], (c) and (d) Micro columns (brass).…”

Section: Fundamental Elements In Micro Millingmentioning

confidence: 99%

Micro Milling

Cheng

2013

Micro‐Cutting

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Creation of Ultra-precision Microstructures with High Aspect Ratios

Cited by 20 publications

References 7 publications

Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools

Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition, and single-crystal diamond micro tools

Micromilling of thin ribs with high aspect ratios

Micro Milling

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