2023
DOI: 10.1016/j.apsusc.2023.157598
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Critical method evaluation refutes the Ar 2p signal of implanted Ar for referencing X-ray photoelectron spectra

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Cited by 30 publications
(1 citation statement)
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“…In contrast to monoatomic Ar ion sputtering, no Ar atoms were incorporated into the NCD film using the ArCIB sputtering. Thus, no interaction between Ar ions and C atoms [37], nor formation of Ar-C bonds [36] are expected by using ArCIB sputtering.…”
Section: Introductionmentioning
confidence: 99%
“…In contrast to monoatomic Ar ion sputtering, no Ar atoms were incorporated into the NCD film using the ArCIB sputtering. Thus, no interaction between Ar ions and C atoms [37], nor formation of Ar-C bonds [36] are expected by using ArCIB sputtering.…”
Section: Introductionmentioning
confidence: 99%