Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope

Hao, Shuying; Zhu, Yulun; Yao, Song; Zhang, Qichang; Feng, Jingjing; Zhang, Kunpeng

doi:10.1155/2020/8880124

Cited by 2 publications

(1 citation statement)

References 17 publications

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“…Shang et al [ 6 ] demonstrated the nonlinear vibration of a parametric exciting gyroscope considering the principal parameter resonance and 1:1 internal resonance. Hao et al [ 7 ] discussed the influence of DC bias voltage and comb spacing on the nonlinearity of electrostatic force and the dynamic response of a 4-DOF electrostatically driven gyroscope. Liang et al [ 8 ] analyzed the nonlinear mechanism of MEMS vibratory ring gyroscopes in which the gyroscopic coupling and geometrically and structurally nonlinear couplings are all considered.…”

Section: Introductionmentioning

confidence: 99%

Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope

Zhang

et al. 2022

Micromachines

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The inclination effect caused by fabrication errors on the periodic response of a symmetric MEMS gyroscope is investigated. The dynamic equation is established considering the inclination effect on support stiffness and electrostatic forces. The periodic response is obtained by the averaging method. The two-variable singularity theory is employed to study the bifurcation characteristics and give transition sets on the DC-AC voltage plane, which divide the plane into four persistent regions. The amplitude-frequency curves demonstrate that only the two persistent regions with low voltages are feasible for the gyroscope. Both over-etching and under-etching reduce the feasible region. The effect of parameters on the performance is present. The mechanical sensitivity and nonlinearity increase with the voltages. With the increase in the inclination angle, the mechanical sensitivity and nonlinearity decrease first and then increase. The full temperature stability of the mechanical sensitivity is also considered. The variation in mechanical sensitivity with temperature is small at a large voltage and negative inclination angle. Under-etching, which leads to small nonlinearity and good temperature stability, is more beneficial to the performance of the gyroscope than over-etching.

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Section: Introductionmentioning

confidence: 99%

Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope

Zhang

et al. 2022

Micromachines

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Dynamical Design and Gain Performance Analysis of a 3-DoF Micro-Gyro with an Anchored Leverage Mechanism

et al. 2022

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In this paper, we apply the leverage amplification principle to improve the gain of a three-degrees-of-freedom (3-DoF) micro-gyro. The gain of the micro-gyro can be improved by designing linear and nonlinear micro-gyros with an anchored lever mechanism (ALM). First, the sensor system of the micro-gyro is designed as a complete 2-DOF system with an ALM. The effect of the leverage rate (LR) on the mass ratio and frequency coupling parameter (FCP) of the complete 2-DOF sense system is studied. We analyze the variation rule of the gain of the lever's input and output as the LR increases. Afterwards, the bandwidth and gain performance of linear and nonlinear micro-gyros with an ALM is investigated by applying the arbitrarily tunable characteristics of peak spacing of the complete 2-DOF system. The influence of LR, FCP, nonlinear strength, damping, and peak spacing on bandwidth and gain of the 3-DOF micro-gyro is analyzed. The results indicate that both LR and FCP have a large effect on the gain and bandwidth of a micro-gyro with an ALM. The LR parameter mainly improves the gain of the micro-gyro, and the FCP parameter mainly adjusts the bandwidth performance. Adding levers can effectively improve the gain performance of the linear micro-gyro. The linear micro-gyro with an ALM can improve the gain by 4.5 dB compared to the one without an ALM. The nonlinear micro-gyro with an ALM combines two characteristics: the nonlinear micro-gyro can improve the bandwidth, while the lever structure can improve the gain. Compared with the linear micro-gyro without an ALM, the gain can be increased by 17.6 dB, and the bandwidth can be improved as well. In addition, the bandwidth of a micro-gyro with an ALM is related to the gain difference between the peaks of the lever output. The increase in the gain difference leads to a flattening of the left peak, which effectively broadens the bandwidth. For nonlinear micro-gyros with an ALM, the bandwidth can be further improved by increasing the nonlinear stiffness coefficient, and better gain and bandwidth can be obtained using a vacuum package.

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Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope

Cited by 2 publications

References 17 publications

Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope

Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope

Dynamical Design and Gain Performance Analysis of a 3-DoF Micro-Gyro with an Anchored Leverage Mechanism

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