The surface structure of Ni plating films that were reacted with methane at 800 C was investigated using scanning electron microscopy and transmission electron microscopy (TEM). The surface of the Ni plating film was eroded by the reaction with methane, resulting in a nano-roughened surface with a hexagonal close-packed structure with a thickness of $ 3 nm. The carbon layer deposited on the Ni plating film was evaluated by electron energy loss spectroscopy. An increase in the π + σ bonding energy and full width at half maximum of the π * peak was observed on moving toward the Ni plating film surface, indicating an increase in the hydrogenated or oxidized carbon atoms on the surface of the Ni plating film.