MeV Au irradiation leads to a shape change of polystyrene (PS) and SiO 2 particles from spherical to ellipsoidal, with an aspect ratio that can be precisely controlled by the ion fluence. Sub-micrometer PS and SiO 2 particles were deposited on copper substrates and irradiated with Au ions at 230 K, using an ion energy and fluence ranging from 2 to 10 MeV and 1 Â 10 14 ions/cm 2 to 1 Â 10 15 ions/cm 2 . The mechanisms of anisotropic deformation of PS and SiO 2 particles are different because of their distinct physical and chemical properties. At the start of irradiation, the volume of PS particles decrease, then the aspect ratio increases with fluence, whereas for SiO 2 particles the volume remains constant.