2020
DOI: 10.1364/ao.384293
|View full text |Cite
|
Sign up to set email alerts
|

Cryogen adaptive and integrated differential pressure sensor for level sensing based on an optical Fabry–Perot interferometer

Abstract: In this paper, we introduce a cryogen-adaptive sensor based on a micro-electromechanical system (MEMS) for level measurement of cryogenic fluids. The sensor is fabricated by an optical fiber inserted in a glass ferrule and an integrated Fabry–Perot (FP) chip using the MEMS technique. We carried a liquid nitrogen level measurement experiment to verify the performance of the sensor and a low coherent interference system is used to transform the liquid level to absolute phase. T… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
3
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(3 citation statements)
references
References 19 publications
0
3
0
Order By: Relevance
“…Reproduced with permission. [ 73 ] Copyright 2019, Wiley‐VCH GmbH., and e) the synthesis of HP‐MOF single nanocrystals. f) TEM images of meso‐HP‐Co/Zn‐ZIF‐75% and macro‐HP‐Co/Zn‐ZIF‐75%.…”
Section: Hierarchically Porous Mofsmentioning
confidence: 99%
See 1 more Smart Citation
“…Reproduced with permission. [ 73 ] Copyright 2019, Wiley‐VCH GmbH., and e) the synthesis of HP‐MOF single nanocrystals. f) TEM images of meso‐HP‐Co/Zn‐ZIF‐75% and macro‐HP‐Co/Zn‐ZIF‐75%.…”
Section: Hierarchically Porous Mofsmentioning
confidence: 99%
“…Using the nonionic surfactant polyvinyl pyrrolidone (PVP) as a template, HP‐Cu‐MOFs with paddle‐wheel structures were successfully fabricated (Figure 5d). [ 73 ] Distinct from the traditional soft template method, which takes advantage of strong interactions between surfactants and MOF precursors, this process is believed that the weak interaction is beneficial to the removal of the template during crystal growth, thus generating more hierarchical pores.…”
Section: Hierarchically Porous Mofsmentioning
confidence: 99%
“…The low-coherence fiber-optic sensors with a Fabry-Pérot cavity are well described in the literature and still explored for new applications and improved performance [24,27]. There are reports about FOSs with Fabry-Pérot cavities made with nanosecond or femtosecond lasers [28,29], lateral offset splicing [30], cavities created during the fiber splicing process [31], or using different types of fiber-optic, e.g.…”
Section: Introductionmentioning
confidence: 99%