Cryogenic Characterization of SAW Resonators

Gugliandolo, Giovanni; Capra, Pier Paolo; Campobello, Giuseppe; Donato, Nicola

doi:10.1109/telsiks46999.2019.9002339

Cited by 3 publications

(3 citation statements)

References 16 publications

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“…Real-time strain monitoring has wide applications in industrial manufacture, civil infrastructure, motor industries, aerospace and satellite communication for structural health monitoring and failure prevention [1][2][3]. Surface acoustic wave (SAW) resonators are intensively studied and hold the promise of in situ applications of temperature [4,5], torque [6,7], strain [8,9], etc., owing to their attractive features, such as passive wireless sensing ability, simple signal processing, high sensitivity, compact size and robustness.…”

Section: Introductionmentioning

confidence: 99%

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Cheng

Yang

et al. 2023

Materials

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Surface acoustic wave (SAW) strain sensors fabricated on piezoelectric substrates have attracted considerable attention due to their attractive features such as passive wireless sensing ability, simple signal processing, high sensitivity, compact size and robustness. To meet the needs of various functioning situations, it is desirable to identify the factors that affect the performance of the SAW devices. In this work, we perform a simulation study on Rayleigh surface acoustic wave (RSAW) based on a stacked Al/LiNbO3 system. A SAW strain sensor with a dual-port resonator was modeled using multiphysics finite element model (FEM) method. While FEM has been widely used for numerical calculations of SAW devices, most of the simulation works mainly focus on SAW modes, SAW propagation characteristics and electromechanical coupling coefficients. Herein, we propose a systematic scheme via analyzing the structural parameters of SAW resonators. Evolution of RSAW eigenfrequency, insertion loss (IL), quality factor (Q) and strain transfer rate with different structural parameters are elaborated by FEM simulations. Compared with the reported experimental results, the relative errors of RSAW eigenfrequency and IL are about 3% and 16.3%, respectively, and the absolute errors are 5.8 MHz and 1.63 dB (the corresponding Vout/Vin is only 6.6%). After structural optimization, the obtained resonator Q increases by 15%, IL decreases by 34.6% and the strain transfer rate increases by 2.4%. This work provides a systematic and reliable solution for the structural optimization of dual-port SAW resonators.

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Section: Introductionmentioning

confidence: 99%

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Cheng

Yang

et al. 2023

Materials

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“…SAW resonators have been successfully employed for temperature and humidity sensing [ 15 , 19 , 20 , 21 ], as pressure sensors [ 16 , 22 , 23 ], biosensors [ 24 ], and for VOC and gas sensing [ 25 , 26 , 27 , 28 ]. They have also been employed in harsh environments [ 14 , 29 , 30 ]. Among the features that characterize these devices, the temperature dependency plays an important role, especially in mobile and wireless communications, as well as in sensing applications.…”

Section: Introductionmentioning

confidence: 99%

Equivalent Circuit Model Extraction for a SAW Resonator: Below and above Room Temperature

Gugliandolo

Marinković

Crupi

et al. 2022

Sensors

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In this work, a SAW resonator is characterized in terms of admittance (Y-) parameters in the temperature range spanning from 0 °C to 100 °C, with the aim of highlighting how its physical properties are affected by the temperature change. A lumped-element equivalent-circuit model is used to represent the device under test at the considered temperature conditions and a parameters extraction process based on a Lorentzian fitting is developed for the determination of the equivalent-circuit elements in the investigated temperature range. A very good agreement is observed between the performed measurements and the model simulations. The characterization process and the subsequent equivalent-circuit parameters extraction at different temperature values are described and discussed.

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“…In recent years, great progress has been made in utilizing surface acoustic wave (SAW) technology since the Rayleigh wave was first proposed by Lord Rayleigh in 1885 [5]. SAW-based temperature sensors are attractive options for the accurate measurement of temperature in harsh environments on account of their full compatibility with wireless data transmission and battery-loss operation [6]. A great deal of research has been dedicated to SAW high temperature sensors to date.…”

Section: Introductionmentioning

confidence: 99%

High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3

et al. 2022

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Low temperature measurement is crucial in deep space exploration. Surface acoustic wave (SAW) sensors can measure temperature wirelessly, making them ideal in extreme situations when wired sensors are not applicable. In this study, 128° YX LiNbO3 was first introduced into low temperature measurements for its little creep or hysteresis in cryogenic environments and affordable price. The finite element method was utilized to raise the design efficiency and optimize the performance of SAW sensors by comparing the performance with different interdigital transducer (IDT) structure parameters, including the height of electrodes, pairs of IDTs, reflecting grid logarithm and acoustic aperture. Once the parameters were changed, a novel design of high-performance SAW temperature sensors based on 128° YX LiNbO3 with double electrode transducers was obtained, of which the Q value could reach up to 5757.18, 4.2-times higher than originally reported. Low temperature tests were conducted, and the frequency responsiveness of SAW sensors was almost linear from −100 °C to 150 °C, which is in good agreement with the simulation results. All results demonstrate that double electrode transducers are considerably efficient for performance enhancement, especially for high-Q SAW sensors, and indicate that LiNbO3 substrate can be a potential high-performance substitute for cryogenic temperature measurements.

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Cryogenic Characterization of SAW Resonators

Cited by 3 publications

References 16 publications

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Modulating the Performance of the SAW Strain Sensor Based on Dual-Port Resonator Using FEM Simulation

Equivalent Circuit Model Extraction for a SAW Resonator: Below and above Room Temperature

High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3

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