2023
DOI: 10.1109/tcsi.2023.3278351
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Cryogenic CMOS for Quantum Processing: 5-nm FinFET-Based SRAM Arrays at 10 K

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Cited by 15 publications
(5 citation statements)
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“…Cooling down to cryogenic temperatures affects the characteristics of short-channel NMOS and PMOS transistors by increasing their threshold voltage V th (100-200 mV), subthreshold slope (∼3× steeper), and carrier mobility (∼2× for low-field mobility) [18], [19], [32], [57], [58], [59], [60], [61]. Additionally, the mismatch between devices increases, as shown in [62] and [63] for 40-nm bulk CMOS and 28-nm bulk CMOS, respectively, interconnect resistance drops (∼30%) [64], and the capacitance of source/drain junctions decreases due to wider depletion regions due to freeze-out [19].…”
Section: Cryo-cmos Device Behaviormentioning
confidence: 99%
“…Cooling down to cryogenic temperatures affects the characteristics of short-channel NMOS and PMOS transistors by increasing their threshold voltage V th (100-200 mV), subthreshold slope (∼3× steeper), and carrier mobility (∼2× for low-field mobility) [18], [19], [32], [57], [58], [59], [60], [61]. Additionally, the mismatch between devices increases, as shown in [62] and [63] for 40-nm bulk CMOS and 28-nm bulk CMOS, respectively, interconnect resistance drops (∼30%) [64], and the capacitance of source/drain junctions decreases due to wider depletion regions due to freeze-out [19].…”
Section: Cryo-cmos Device Behaviormentioning
confidence: 99%
“…The steeper sub-threshold characteristics at the cryogenic temperature also improves static noise margin of the inverter and the SRAM cell at lower V DD compared to the room temperature, as demonstrated in [4], [5]. Further, the power, delay and reliability of 5nm FinFET SRAM circuits has been studied at deep cryogenic temperatures [6]. A recent theoretical study demonstrated 4× improvement in performance-per-watt at the processor level (Arm Cortex-A53) at cryogenic temperatures [7].…”
Section: Introductionmentioning
confidence: 98%
“…These predictive model cards are scalable with temperatures, and also scalable with device engineering (e.g., V DD and V TH tuning) and major process variations. It is worth noting that [6] has created model cards for the 5nm FinFET technology node. However, our work stands out in that we have expanded the flexibility of these model cards to predict the behavior of CMOS logic circuits at cryogenic temperatures.…”
Section: Introductionmentioning
confidence: 99%
“…Some first-principles and density functional theory (DFT) computational methods have been utilized to calculate the electrical properties of stacked NSs and have been employed to guide the design of stacked NS devices [ 11 , 12 ]. Unfortunately, although there have been some studies on the low-temperature characteristics of NS transistors for specific channel structures and customized processes [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ], there is little research on the low-temperature carrier transport characteristics of NS transistors with a general structure using mainstream fabrication processes based on HK/MG-last technologies. Furthermore, data on the quantum transport characteristics and relative quantum dot operation behavior of NS devices are also lacking.…”
Section: Introductionmentioning
confidence: 99%