We report on the demonstration and characterization of a silicon optical resonator for laser frequency stabilization, operating in the deep cryogenic regime at temperatures as low as 1.5 K. Robust operation was achieved, with absolute frequency drift less than 20 Hz over 1 hour. This stability allowed sensitive measurements of the resonator thermal expansion coefficient (α). We found α = 4.6 × 10 −13 K −1 at 1.6 K. At 16.8 K α vanishes, with a derivative equal to −6 × 10 −10 K −2 . The temperature of the resonator was stabilized to a level below 10 µK for averaging times longer than 20 s. The sensitivity of the resonator frequency to a variation of the laser power was also studied. The corresponding sensitivities, and the expected Brownian noise indicate that this system should enable frequency stabilization of lasers at the low-10 −17 level. c 2014 Optical Society of America OCIS codes: 120.3940, 120.4800, 140.3425, 140.4780. Optical resonators with low sensitivity to temperature and mechanical forces are of significant importance for precision measurements in the optical and microwave frequency domain. In the optical domain, they serve to stabilize the frequencies of lasers for spectroscopic applications, notably for optical atomic clocks, and for probing fundamental physics issues such as the properties of space-time. Also, by conversion of ultrastable optical frequencies to the radio-frequency domain via an optical frequency comb, radio-frequency sources with ultralow phase noise can be realized [1], leading to e.g. radar measurements with improved sensitivity.The conventional approach for ultra-stable optical resonators is the use of ULE (ultra-low expansion glass) material, operated at temperatures near room temperature, where the coefficient of thermal expansion (CTE) exhibits a zero crossing. While ULE resonators with optimized designs (long length, acceleration-insensitive shape) have reached impressive performance [2], their operating temperature near 300 K necessarily leads to a level of Brownian length fluctuations which imposes a fundamental limit to the achievable frequency stability [3], [4]. Cryogenic operation of a resonator provides one avenue towards reduction of these fluctuations. The Allan deviation of length fluctuations decreases proportional to √ T [3], if the mechanical dissipation of the resonator elements, in particular of the mirror coatings, is independent of temperature. Measurements performed thus far indicate that the dissipation of mirrors with crystalline substrates at cryogenic temperature are indeed similar to those of fused silica mirrors at room temperature [5], [6]. Nowadays, robust cryogenic solutions exist for continuous operation of even fairly large objects, such as optical resonators, at temperatures as low as 0.1 K. This offers the possibility of reduction of resonator length fluctuations by more than one order of magnitude compared to today's lowest levels realized at room temperature, with a corresponding reduction in frequency instability of the laser stabiliz...